发明授权
- 专利标题: Semiconductor device and method of manufacturing the same, and electronic apparatus
- 专利标题(中): 半导体装置及其制造方法以及电子设备
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申请号: US12722069申请日: 2010-03-11
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公开(公告)号: US09451131B2公开(公告)日: 2016-09-20
- 发明人: Taku Umebayashi , Hiroshi Takahashi , Reijiroh Shohji
- 申请人: Taku Umebayashi , Hiroshi Takahashi , Reijiroh Shohji
- 申请人地址: JP Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Sheridan Ross P.C.
- 优先权: JP2009-068582 20090319; JP2010-012586 20100122
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L31/062 ; H01L31/113 ; H04N5/225 ; H01L27/146 ; H04N5/374
摘要:
A semiconductor device is provided as a back-illuminated solid-state imaging device. The device is manufactured by bonding a first semiconductor wafer with a pixel array in a half-finished product state and a second semiconductor wafer with a logic circuit in a half-finished product state together, making the first semiconductor wafer into a thin film, electrically connecting the pixel array and the logic circuit, making the pixel array and the logic circuit into a finished product state, and dividing the first semiconductor wafer and the second semiconductor being bonded together into microchips.
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