Invention Grant
US09453874B2 Actuator, handler apparatus and test apparatus 有权
执行器,处理仪器和测试仪器

Actuator, handler apparatus and test apparatus
Abstract:
Provided is an actuator including: first to third rotation axes provided at a fixed section and having axes in a same direction, first to third rotation sections provided at positions offset from centers of the corresponding rotation axes, and rotating in response to the corresponding rotation axes; a movable section including first and third side walls facing the first and the third rotation sections in a first direction on a movable plane, and a second side wall facing the second rotation section in a second direction, the movable section moving on a predetermined movable plane in response to rotation of the first to third rotation sections; and a biasing section biasing the movable section with respect to the fixed section in at least one of the first direction and the second direction, and making at least one of the first to third rotation sections abut against the corresponding side wall.
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