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公开(公告)号:US11579187B1
公开(公告)日:2023-02-14
申请号:US17681039
申请日:2022-02-25
Applicant: ADVANTEST Corporation
Inventor: Toshiyuki Kiyokawa , Yuya Yamada
IPC: G01R31/28
Abstract: A test carrier that accommodates a DUT and includes a first flow passage through which fluid supplied from an outside of the test carrier flows.
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公开(公告)号:US09874605B2
公开(公告)日:2018-01-23
申请号:US14659580
申请日:2015-03-16
Applicant: ADVANTEST CORPORATION
Inventor: Mitsunori Aizawa , Yuya Yamada
CPC classification number: G01R31/2887 , G01R1/0433 , G01R31/043 , G01R31/2891 , G01R31/2893
Abstract: To electrically connect a device under test mounted on a device holder and a socket of a test apparatus with accuracy. Provided is a device holder that retains a device, the device holder including: an inner unit that mounts the device; and an outer unit that retains the inner unit such that the inner unit is relatively movable, wherein the inner unit switches whether to lock the outer unit relative to the inner unit or to release the lock. Also, the inner unit and the outer unit of the device holder are provided.
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公开(公告)号:US09784789B2
公开(公告)日:2017-10-10
申请号:US14472392
申请日:2014-08-29
Applicant: ADVANTEST CORPORATION
Inventor: Aritomo Kikuchi , Tsuyoshi Yamashita , Mitsunori Aizawa , Hiromitsu Horino , Yuya Yamada , Masataka Onozawa
CPC classification number: G01R31/2891 , G01C11/00 , G01R1/0441 , G01R31/2893
Abstract: Provided is a handler apparatus that conveys a device under test to a test socket, including: a socket for adjustment which, prior to fitting of a device holder holding the device under test to the test socket, fits the device holder; a socket-for-adjustment position detecting section that detects a relative position of the device under test with respect to the socket for adjustment, in a state in which the device holder fits the socket for adjustment; an actuator that adjusts a position of the device under test on the device holder, based on the detected relative position of the device under test; and a conveyer that conveys the device holder, in which a position of the device under test has been adjusted, to fit the test socket.
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公开(公告)号:US20230296666A1
公开(公告)日:2023-09-21
申请号:US18163056
申请日:2023-02-01
Applicant: ADVANTEST Corporation
Inventor: Yuya Yamada , Aritomo Kikuchi , Yasuyuki Kato
CPC classification number: G01R31/2877 , F28F13/125 , G01R31/2886
Abstract: A temperature adjusting device adjusts a temperature of a device under test (DUT) electrically connected to a socket, and includes: a fluid connector connected to a fluid supply source that supplies a fluid; a heat exchanger thermally connected to at least one of the DUT and a carrier holding the DUT in a state that the at least one of the DUT and the carrier is pressed against the socket; a first flow path passing through an inside of the heat exchanger; and a first swirl flow forming part that swirls a flow of the fluid to form a first swirl flow and supplies the first swirl flow to the first flow path, the first swirl swirling along an inner surface of the first flow path around a first central axis of the first flow path.
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公开(公告)号:US20200371158A1
公开(公告)日:2020-11-26
申请号:US16860515
申请日:2020-04-28
Applicant: ADVANTEST Corporation
Inventor: Yasuyuki Kato , Yuya Yamada , Shintaro Takaki , Hiroki Hosogai
Abstract: An electronic component handling apparatus includes: a moving device that presses a device under test (DUT) against a socket of a test head. The moving device includes: a pusher that contacts the DUT; and a heater that heats the DUT through the pusher. The pusher includes: an internal space; and a first flow path that communicates with the internal space. Fluid from the test head is supplied to the internal space through the first flow path.
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公开(公告)号:US09606170B2
公开(公告)日:2017-03-28
申请号:US14472394
申请日:2014-08-29
Applicant: ADVANTEST CORPORATION
Inventor: Tsuyoshi Yamashita , Mitsunori Aizawa , Hiromitsu Horino , Yuya Yamada , Masataka Onozawa
CPC classification number: G01R31/2891 , G01C11/00 , G01R1/0441 , G01R31/2893
Abstract: Provided is a handler apparatus that conveys a device under test to a test socket, including: a socket fitting unit which the test socket fits, prior to fitting of a device holder holding the device under test to the test socket; a test-socket position detecting section that detects a relative position of the socket fitting unit with respect to the test socket in a state in which the socket fitting unit fits the test socket; an actuator that adjusts a position of the device under test on the device holder, based on the detected relative position of the socket fitting unit; and a conveyer that conveys the device holder in which the position of the device under test has been adjusted, to fit the test socket.
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公开(公告)号:US20250027988A1
公开(公告)日:2025-01-23
申请号:US18708854
申请日:2021-11-09
Applicant: ADVANTEST Corporation
Inventor: Yuya Yamada , Guenther Jeserer
IPC: G01R31/28
Abstract: A temperature adjustment system for adjusting a temperature of a DUT electrically connected to a socket includes a first temperature adjustment device that supplies a fluid to an internal space in either the socket or a contact member that contacts the DUT when the DUT is pressed against the socket and a second temperature adjustment device that adjusts a temperature of an atmosphere in a chamber in which the socket and the contact member are disposed. The first temperature adjustment device includes a first supplier that supplies a first fluid and includes one or more connectors connected to one or more supply sources that supply the first fluid and a heat exchanger disposed between the one or more connectors and the internal space. The heat exchanger has a heat exchange part exposed in the chamber and exchanges heat between the first fluid and the atmosphere in the chamber.
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公开(公告)号:US20230305053A1
公开(公告)日:2023-09-28
申请号:US18085794
申请日:2022-12-21
Applicant: ADVANTEST Corporation
Inventor: Yuya Yamada
CPC classification number: G01R31/2875 , G01R1/0458 , G01R31/2863 , G01R31/2877
Abstract: An electronic component handling apparatus that handles a DUT or a carrier accommodating the DUT, including: a pressing device that: electrically connects the DUT to a socket by pressing the DUT or the carrier toward the socket, and includes: a temperature control device that: controls a temperature of the DUT, and includes: a heater unit that is a heat source, the heater unit including: a flat heater; a first heat transfer material disposed on a first main surface of the flat heater; and a second heat transfer material disposed on a second main surface of the flat heater.
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公开(公告)号:US20230251304A1
公开(公告)日:2023-08-10
申请号:US18085917
申请日:2022-12-21
Applicant: ADVANTEST Corporation
Inventor: Yuya Yamada
IPC: G01R31/28
CPC classification number: G01R31/2863 , G01R31/2865 , G01R31/2891
Abstract: An electronic component handling apparatus that handles a pressed body including a DUT or a carrier accommodating the DUT, includes: a pressing device that electrically connects the DUT to a socket by pressing the pressed body toward the socket, and includes: a contact plate that contacts the pressed body; and a retainer that holds the contact plate, the contact plate being separated from the retainer while the contact plate contacts the pressed body, and the contact plate being held by the retainer while the contact plate is separated from the pressed body.
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公开(公告)号:US09772373B2
公开(公告)日:2017-09-26
申请号:US14472385
申请日:2014-08-29
Applicant: ADVANTEST CORPORATION
Inventor: Mitsunori Aizawa , Yuya Yamada
CPC classification number: G01R31/2887 , G01R1/0433 , G01R31/043 , G01R31/2891 , G01R31/2893
Abstract: Provided is a handler apparatus that conveys a device under test to a test socket, including: an actuator that, prior to fitting of a device holder to the test socket, fits the device holder, and adjusts a position of the device under test on the device holder; and a conveyer that conveys the device holder in which a position of the device under test has been adjusted, to fit the test socket, where the device holder includes: an inner unit to mount the device under test; an outer unit to retain the inner unit to be movable; and a release button to release a lock of movement of the inner unit, in response to being pressed from a side to which the device under test is mounted, and the actuator sets the inner unit to be movable by pressing the release button and adjusts a position of the inner unit.
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