Invention Grant
- Patent Title: Die bonding device
- Patent Title (中): 模具接合装置
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Application No.: US14660093Application Date: 2015-03-17
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Publication No.: US09455165B2Publication Date: 2016-09-27
- Inventor: Yisung Hwang , Sugil Lee , Dongjun Kim , Yongdae Ha
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel & Sibley, PA
- Priority: KR10-2014-0045560 20140416
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/677 ; H01L21/687

Abstract:
A die bonding device includes: a wafer holder supporting a wafer where a die is formed; an ejector holder disposed at the wafer holder below the wafer and supporting a die ejector that assists separating the die from the wafer; a support unit supporting a substrate where the die is to be attached; a bonding unit that picks up the die from the wafer and attaches the picked-up die to the substrate; an ejector buffer unit that receives the die ejector; and a replacing unit that transfers the die ejector between the ejector holder and the ejector buffer unit.
Public/Granted literature
- US20150303081A1 Die Bonding Device Public/Granted day:2015-10-22
Information query
IPC分类: