Invention Grant
- Patent Title: Test device, semiconductor device and testing method thereof
- Patent Title (中): 测试装置，半导体装置及其测试方法
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Application No.: US13945819Application Date: 2013-07-18
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Publication No.: US09459309B2Publication Date: 2016-10-04
- Inventor: Jun-So Pak , Jun-Ho Lee , Joung-Ho Kim
- Applicant: SK Hynix Inc. , Korea Advanced Institute of Science and Technology
- Applicant Address: KR Icheon KR Daejeon
- Assignee: SK HYNIX INC.,KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee: SK HYNIX INC.,KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: KR Icheon KR Daejeon
- Priority: KR10-2012-0088725 20120814
- Main IPC: G01R31/26
- IPC: G01R31/26 ; G01R31/319 ; G01R31/28
Abstract:
A test device for testing a semiconductor device including a TSV may comprise a ring oscillator including a plurality of inverters, a switch selectively connecting an output node of an inverter of the plurality of inverters and the TSV, and a controller controlling the switch.
Public/Granted literature
- US20140049284A1 TEST DEVICE, SEMICONDUCTOR DEVICE AND TESTING METHOD THEREOF Public/Granted day:2014-02-20
Information query
