公开(公告)号：US09459309B2

公开(公告)日：2016-10-04

申请号：US13945819

申请日：2013-07-18

Applicant: SK Hynix Inc. ,  Korea Advanced Institute of Science and Technology

Inventor： Jun-So Pak ,  Jun-Ho Lee ,  Joung-Ho Kim

IPC: G01R31/26 ,  G01R31/319 ,  G01R31/28

CPC classification number: G01R31/2601 ,  G01R31/2853 ,  G01R31/31926

Abstract: A test device for testing a semiconductor device including a TSV may comprise a ring oscillator including a plurality of inverters, a switch selectively connecting an output node of an inverter of the plurality of inverters and the TSV, and a controller controlling the switch.

Abstract translation: 用于测试包括TSV的半导体器件的测试装置可以包括环形振荡器，其包括多个反相器，选择性地连接多个反相器的反相器的输出节点和TSV的开关以及控制开关的控制器。

公开(公告)号：US20140049284A1

公开(公告)日：2014-02-20

申请号：US13945819

申请日：2013-07-18

Applicant: Korea Advanced Institute of Science and Technology ,  SK Hynix Inc.

Inventor： Jun-So Pak ,  Jun-Ho Lee ,  Joung-Ho Kim

IPC: G01R31/26

CPC classification number: G01R31/2601 ,  G01R31/2853 ,  G01R31/31926

Abstract: A test device for testing a semiconductor device including a TSV may comprise a ring oscillator including a plurality of inverters, a switch selectively connecting an output node of an inverter of the plurality of inverters and the TSV, and a controller controlling the switch.

Abstract translation: 用于测试包括TSV的半导体器件的测试装置可以包括环形振荡器，其包括多个反相器，选择性地连接多个反相器的反相器的输出节点和TSV的开关以及控制开关的控制器。