Invention Grant
- Patent Title: Batch fabrication method of three-dimensional photonic microstructures
- Patent Title (中): 三维光子微观结构的批量制作方法
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Application No.: US14635186Application Date: 2015-03-02
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Publication No.: US09459381B2Publication Date: 2016-10-04
- Inventor: Ki-Hun Jeong , Jae-Jun Kim , Dongmin Keum
- Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
- Applicant Address: KR
- Assignee: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2014-0024849 20140303
- Main IPC: B29D11/00
- IPC: B29D11/00 ; G02B3/00 ; G02B1/00 ; G02B1/12 ; B81C99/00 ; B82Y20/00 ; B82Y30/00 ; B82Y40/00 ; G02B1/04 ; G02B1/118 ; G03F7/00
Abstract:
Provided is a batch fabrication method of three-dimensional photonic microstructures including a support structure fabricating step, a variable structure fabricating step, a thermal reflow step, and a three-dimensional photonic microstructure forming step. The batch fabrication method of three-dimensional photonic microstructures fabricates three-dimensional photonic microstructures having several shapes depending on a demand of a user through these steps.
Public/Granted literature
- US20150247954A1 BATCH FABRICATION METHOD OF THREE-DIMENSIONAL PHOTONIC MICROSTRUCTURES Public/Granted day:2015-09-03
Information query
