发明授权
- 专利标题: Feedback control using detection of clearance and adjustment for uniform topography
- 专利标题(中): 反馈控制使用检测间隙和调整均匀的地形
-
申请号: US13774843申请日: 2013-02-22
-
公开(公告)号: US09472475B2公开(公告)日: 2016-10-18
- 发明人: Kun Xu , Ingemar Carlsson , Tzu-Yu Liu , Shih-Haur Shen , Boguslaw A. Swedek , Wen-Chiang Tu , Lakshmanan Karuppiah
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Fish & Richardson P.C.
- 主分类号: H01L21/66
- IPC分类号: H01L21/66 ; B24B37/005 ; B24B37/04 ; B24B49/12
摘要:
A method of controlling polishing includes storing a desired ratio representing a ratio for a clearance time of a first zone of a substrate to a clearance time of a second zone of the substrate. During polishing of a first substrate, an overlying layer is monitored, a sequence of measurements is generated, and the measurements are sorted a first group associated with the first zone of the substrate and a second group associated with the second zone on the substrate. A first time and a second time at which the overlying layer is cleared is determined based on the measurements from the first group and the second group, respectively. At least one adjusted polishing pressure is calculated for the first zone based on a first pressure applied in the first zone during polishing the first substrate, the first time, the second time, and the desired ratio.
公开/授权文献
信息查询
IPC分类: