Invention Grant
- Patent Title: Integrated avalanche germanium photodetector
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Application No.: US14757617Application Date: 2015-12-23
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Publication No.: US09472705B2Publication Date: 2016-10-18
- Inventor: Hongtao Chen , Joris Van Campenhout , Gunther Roelkens
- Applicant: IMEC VZW , Universiteit Gent
- Applicant Address: BE Leuven BE Ghent
- Assignee: IMEC VZW,Universiteit Gent
- Current Assignee: IMEC VZW,Universiteit Gent
- Current Assignee Address: BE Leuven BE Ghent
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP14199730 20141222
- Main IPC: H01L31/107
- IPC: H01L31/107 ; H01L31/0232 ; H01L31/105 ; H01L31/028 ; H01L31/18

Abstract:
An integrated avalanche photodetector and a method for fabrication thereof. The integrated avalanche photodetector comprises a Ge body adapted to conduct an optical mode. The Ge body comprises a first p-doped region that extends from a first main surface to a second main surface of the Ge body. The Ge body further comprises a first n-doped region that extends from the first main surface towards the second main surface of the Ge body. An intrinsic region occupies the undoped part of the Ge body. A first avalanche junction is formed by the first n-doped region that is located aside the p-doped region. The Ge body further comprises an incidence surface, suitable for receiving an optical mode, and a second n-doped Ge region that covers the Ge body and forms a second avalanche junction with the first p-doped region at the first main surface.
Public/Granted literature
- US20160204298A1 Integrated avalanche germanium photodetector Public/Granted day:2016-07-14
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