Invention Grant
US09472706B2 Image sensor having a plurality of phototransistors separated by trench-gate structures and method of manufacturing the same
有权
图像传感器具有通过沟槽栅极结构分离的多个光电晶体管及其制造方法
- Patent Title: Image sensor having a plurality of phototransistors separated by trench-gate structures and method of manufacturing the same
- Patent Title (中): 图像传感器具有通过沟槽栅极结构分离的多个光电晶体管及其制造方法
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Application No.: US14560037Application Date: 2014-12-04
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Publication No.: US09472706B2Publication Date: 2016-10-18
- Inventor: Katsuyuki Sakurano , Takaaki Negoro , Katsuhiko Aisu , Kazuhiro Yoneda , Yasukazu Nakatani , Hirofumi Watanabe
- Applicant: Katsuyuki Sakurano , Takaaki Negoro , Katsuhiko Aisu , Kazuhiro Yoneda , Yasukazu Nakatani , Hirofumi Watanabe
- Applicant Address: JP Tokyo
- Assignee: RICOH COMPANY, LTD.
- Current Assignee: RICOH COMPANY, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Cooper & Dunham LLP
- Priority: JP2013-259021 20131216
- Main IPC: H01L31/113
- IPC: H01L31/113 ; H01L27/146

Abstract:
A semiconductor device and a method of manufacturing a semiconductor device are disclosed. The method includes forming a trench, in a vertical direction of a semiconductor substrate having a plurality of photoelectric converting elements arranged on the semiconductor device, at positions between the photoelectric converting elements that are next to each other, forming a first conductive-material layer in and above the trench by implanting a first conductive material into the trench after an oxide film is formed on an inner wall of the trench, forming a first conductor by removing the first conductive-material layer excluding a first conductive portion of the first conductive-material layer implanted into the trench, and forming an upper gate electrode above the first conductor, the upper gate electrode configured to be conductive with the first conductor. The semiconductor device includes a semiconductor substrate, an image sensor, a trench, a first conductor, and an upper gate electrode.
Public/Granted literature
- US20150171129A1 SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD Public/Granted day:2015-06-18
Information query
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