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US09473719B2 Protection layer in CMOS image sensor array region 有权
CMOS图像传感器阵列区域中的保护层

Protection layer in CMOS image sensor array region
Abstract:
A semiconductor image sensor device having a conformal protective layer includes a semiconductor substrate a pixel-array region and a peripheral region. The conformal protective layer is disposed over a plurality of pixels having a photodiode and a plurality of transistors in the pixel-array region. Contacts to the plurality of transistors are surrounded by the conformal protective layer. In some embodiments, the conformal protective layer is the same material as transistor gate spacers in the peripheral region.
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