Invention Grant
- Patent Title: Device and method for fabricating thin semiconductor channel and buried strain memorization layer
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Application No.: US14717551Application Date: 2015-05-20
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Publication No.: US09478658B2Publication Date: 2016-10-25
- Inventor: Kangguo Cheng , Bruce B. Doris , Ali Khakifirooz , Pranita Kulkarni , Ghavam G. Shahidi
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/76 ; H01L31/036 ; H01L31/112 ; H01L29/78 ; H01L21/02 ; H01L21/265

Abstract:
A device and method for inducing stress in a semiconductor layer includes providing a substrate having a dielectric layer formed between a first semiconductor layer and a second semiconductor layer and processing the second semiconductor layer to form an amorphized material. A stress layer is deposited on the first semiconductor layer. The wafer is annealed to memorize stress in the second semiconductor layer by recrystallizing the amorphized material.
Public/Granted literature
- US20150255603A1 DEVICE AND METHOD FOR FABRICATING THIN SEMICONDUCTOR CHANNEL AND BURIED STRAIN MEMORIZATION LAYER Public/Granted day:2015-09-10
Information query
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