Invention Grant
US09481018B2 Feeding device and object driving device 有权
进料装置和物体驱动装置

Feeding device and object driving device
Abstract:
To provide a feeding device capable of driving an object with high accuracy while holding the object and controlling its attitude and capable of improving durability by separating a holding device and a driving device from each other, and an object driving device. The feeding device movably disposed through a cover device to face a work region shielded by the cover device, for holding an object, includes: a first rotary saddle that is rotatable about a first axis; a second rotary saddle disposed on the first rotary saddle and rotatable about a second axis perpendicular to the first axis; a holding device that holds the object; a first driving device disposed outward of the cover device with regarding the work region to rotate the first rotary saddle; and second driving device disposed outward of the cover device with respect to the work region to rotate the second rotary saddle.
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