Invention Grant
US09489599B2 Decision tree construction for automatic classification of defects on semiconductor wafers 有权
用于半导体晶片缺陷自动分类的决策树构造

Decision tree construction for automatic classification of defects on semiconductor wafers
Abstract:
Methods and systems for decision tree construction for automatic classification of defects on semiconductor wafers are provided. One method includes creating a decision tree for classification of defects detected on a wafer by altering one or more floating trees in the decision tree. The one or more floating trees are sub-trees that are manipulated as individual units. In addition, the method includes classifying the defects detected on the wafer by applying the decision tree to the defects.
Information query
Patent Agency Ranking
0/0