Invention Grant
- Patent Title: Decision tree construction for automatic classification of defects on semiconductor wafers
- Patent Title (中): 用于半导体晶片缺陷自动分类的决策树构造
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Application No.: US14257921Application Date: 2014-04-21
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Publication No.: US09489599B2Publication Date: 2016-11-08
- Inventor: Chien-Huei (Adam) Chen , Chris Maher , Patrick Huet , Tai-Kam Ng , John Raymond Jordan, III
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corp.
- Current Assignee: KLA-Tencor Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06K9/62 ; G06T7/00

Abstract:
Methods and systems for decision tree construction for automatic classification of defects on semiconductor wafers are provided. One method includes creating a decision tree for classification of defects detected on a wafer by altering one or more floating trees in the decision tree. The one or more floating trees are sub-trees that are manipulated as individual units. In addition, the method includes classifying the defects detected on the wafer by applying the decision tree to the defects.
Public/Granted literature
- US20150125064A1 Decision Tree Construction for Automatic Classification of Defects on Semiconductor Wafers Public/Granted day:2015-05-07
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