公开(公告)号：US20200126212A1

公开(公告)日：2020-04-23

申请号：US16364161

申请日：2019-03-25

Applicant: KLA-Tencor Corporation

Inventor： Brian Duffy ,  Martin Plihal ,  Santosh Bhattacharyya ,  Gordon Rouse ,  Chris Maher ,  Erfan Soltanmohammadi

IPC: G06T7/00 ,  H01L21/66 ,  G06T7/11 ,  G01R31/308 ,  G03F7/20

Abstract: Methods and systems for setting up inspection of a specimen with design and noise based care areas are provided. One system includes one or more computer subsystems configured for generating a design-based care area for a specimen. The computer subsystem(s) are also configured for determining one or more output attributes for multiple instances of the care area on the specimen, and the one or more output attributes are determined from output generated by an output acquisition subsystem for the multiple instances. The computer subsystem(s) are further configured for separating the multiple instances of the care area on the specimen into different care area sub-groups such that the different care area sub-groups have statistically different values of the output attribute(s) and selecting a parameter of an inspection recipe for the specimen based on the different care area sub-groups.

公开(公告)号：US10832396B2

公开(公告)日：2020-11-10

申请号：US16364161

申请日：2019-03-25

Applicant: KLA-Tencor Corporation

Inventor： Brian Duffy ,  Martin Plihal ,  Santosh Bhattacharyya ,  Gordon Rouse ,  Chris Maher ,  Erfan Soltanmohammadi

IPC: G03F1/84 ,  G06T7/00 ,  H01L21/66 ,  G06T7/11 ,  G03F7/20 ,  G01R31/308

Abstract: Methods and systems for setting up inspection of a specimen with design and noise based care areas are provided. One system includes one or more computer subsystems configured for generating a design-based care area for a specimen. The computer subsystem(s) are also configured for determining one or more output attributes for multiple instances of the care area on the specimen, and the one or more output attributes are determined from output generated by an output acquisition subsystem for the multiple instances. The computer subsystem(s) are further configured for separating the multiple instances of the care area on the specimen into different care area sub-groups such that the different care area sub-groups have statistically different values of the output attribute(s) and selecting a parameter of an inspection recipe for the specimen based on the different care area sub-groups.

公开(公告)号：US09489599B2

公开(公告)日：2016-11-08

申请号：US14257921

申请日：2014-04-21

Applicant: KLA-Tencor Corporation

Inventor： Chien-Huei (Adam) Chen ,  Chris Maher ,  Patrick Huet ,  Tai-Kam Ng ,  John Raymond Jordan, III

IPC: G06K9/00 ,  G06K9/62 ,  G06T7/00

CPC classification number: G06K9/6285 ,  G06K9/6282 ,  G06T7/0004

Abstract: Methods and systems for decision tree construction for automatic classification of defects on semiconductor wafers are provided. One method includes creating a decision tree for classification of defects detected on a wafer by altering one or more floating trees in the decision tree. The one or more floating trees are sub-trees that are manipulated as individual units. In addition, the method includes classifying the defects detected on the wafer by applying the decision tree to the defects.

Abstract translation: 提供了用于半导体晶片上的缺陷自动分类的决策树构造的方法和系统。 一种方法包括通过改变决策树中的一个或多个浮动树来创建用于分类在晶片上检测到的缺陷的决策树。 一个或多个浮动树是作为单独单元操纵的子树。 此外，该方法包括通过将决策树应用于缺陷来分类在晶片上检测到的缺陷。

公开(公告)号：US20150125064A1

公开(公告)日：2015-05-07

申请号：US14257921

申请日：2014-04-21

Applicant: KLA-Tencor Corporation

Inventor： Chien-Huei (Adam) Chen ,  Chris Maher ,  Patrick Huet ,  Tai-Kam Ng ,  John Raymond Jordan, III

IPC: G06K9/62 ,  G06T7/00

CPC classification number: G06K9/6285 ,  G06K9/6282 ,  G06T7/0004

Abstract: Methods and systems for decision tree construction for automatic classification of defects on semiconductor wafers are provided. One method includes creating a decision tree for classification of defects detected on a wafer by altering one or more floating trees in the decision tree. The one or more floating trees are sub-trees that are manipulated as individual units. In addition, the method includes classifying the defects detected on the wafer by applying the decision tree to the defects.

Abstract translation: 提供了用于半导体晶片上的缺陷自动分类的决策树构造的方法和系统。 一种方法包括通过改变决策树中的一个或多个浮动树来创建用于分类在晶片上检测到的缺陷的决策树。 一个或多个浮动树是作为单独单元操纵的子树。 此外，该方法包括通过将决策树应用于缺陷来分类在晶片上检测到的缺陷。