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公开(公告)号：US10902579B1
公开(公告)日：2021-01-26
申请号：US16188674
申请日：2018-11-13
Applicant: KLA-Tencor Corporation
Inventor： Erfan Soltanmohammadi , Martin Plihal , Tai-Kam Ng , Sang Hyun Lee
Abstract: Defects of interest can be captured by a classifier. Images of a semiconductor wafer can be received at a deep learning classification module. These images can be sorted into soft decisions with the deep learning classification module. A class of the defect of interest for an image can be determined from the soft decisions. The deep learning classification module can be in electronic communication with an optical inspection system or other types of semiconductor inspection systems.
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2.发明授权Decision tree construction for automatic classification of defects on semiconductor wafers 有权用于半导体晶片缺陷自动分类的决策树构造公开(公告)号：US09489599B2
公开(公告)日：2016-11-08
申请号：US14257921
申请日：2014-04-21
Applicant: KLA-Tencor Corporation
Inventor： Chien-Huei (Adam) Chen , Chris Maher , Patrick Huet , Tai-Kam Ng , John Raymond Jordan, III
CPC classification number: G06K9/6285 , G06K9/6282 , G06T7/0004
Abstract: Methods and systems for decision tree construction for automatic classification of defects on semiconductor wafers are provided. One method includes creating a decision tree for classification of defects detected on a wafer by altering one or more floating trees in the decision tree. The one or more floating trees are sub-trees that are manipulated as individual units. In addition, the method includes classifying the defects detected on the wafer by applying the decision tree to the defects.
Abstract translation: 提供了用于半导体晶片上的缺陷自动分类的决策树构造的方法和系统。 一种方法包括通过改变决策树中的一个或多个浮动树来创建用于分类在晶片上检测到的缺陷的决策树。 一个或多个浮动树是作为单独单元操纵的子树。 此外，该方法包括通过将决策树应用于缺陷来分类在晶片上检测到的缺陷。
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3.发明申请Decision Tree Construction for Automatic Classification of Defects on Semiconductor Wafers 有权用于自动分类半导体晶片缺陷的决策树构造公开(公告)号：US20150125064A1
公开(公告)日：2015-05-07
申请号：US14257921
申请日：2014-04-21
Applicant: KLA-Tencor Corporation
Inventor： Chien-Huei (Adam) Chen , Chris Maher , Patrick Huet , Tai-Kam Ng , John Raymond Jordan, III
CPC classification number: G06K9/6285 , G06K9/6282 , G06T7/0004
Abstract: Methods and systems for decision tree construction for automatic classification of defects on semiconductor wafers are provided. One method includes creating a decision tree for classification of defects detected on a wafer by altering one or more floating trees in the decision tree. The one or more floating trees are sub-trees that are manipulated as individual units. In addition, the method includes classifying the defects detected on the wafer by applying the decision tree to the defects.
Abstract translation: 提供了用于半导体晶片上的缺陷自动分类的决策树构造的方法和系统。 一种方法包括通过改变决策树中的一个或多个浮动树来创建用于分类在晶片上检测到的缺陷的决策树。 一个或多个浮动树是作为单独单元操纵的子树。 此外，该方法包括通过将决策树应用于缺陷来分类在晶片上检测到的缺陷。
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