Invention Grant
- Patent Title: Integrated circuits having improved gate structures and methods for fabricating same
- Patent Title (中): 具有改进的门结构的集成电路及其制造方法
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Application No.: US14272952Application Date: 2014-05-08
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Publication No.: US09490129B2Publication Date: 2016-11-08
- Inventor: Xiang Hu , Huang Liu
- Applicant: GLOBALFOUNDRIES, Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Lorenz & Kopf, LLP
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/28 ; H01L21/8234 ; H01L29/49 ; H01L29/66 ; H01L21/308 ; H01L21/3105 ; H01L21/3213 ; H01L21/311 ; H01L27/088

Abstract:
Integrated circuits with improved gate structures and methods for fabricating integrated circuits with improved gate structures are provided. In an embodiment, a method for fabricating an integrated circuit includes providing a semiconductor substrate with fin structures. A gate-forming material is deposited over the semiconductor substrate and fin structures. The method includes performing a first etch process to etch the gate-forming material to form a gate line having a first side and a second side. The first side and second side of the gate line are bounded with material. The method includes performing a second etch process to etch a portion of the gate line bound by the material to separate the gate line into adjacent gate structures and to define a tip-to-tip distance between the adjacent gate structures.
Public/Granted literature
- US20150325482A1 INTEGRATED CIRCUITS HAVING IMPROVED GATE STRUCTURES AND METHODS FOR FABRICATING SAME Public/Granted day:2015-11-12
Information query
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