Invention Grant
US09490129B2 Integrated circuits having improved gate structures and methods for fabricating same 有权
具有改进的门结构的集成电路及其制造方法

Integrated circuits having improved gate structures and methods for fabricating same
Abstract:
Integrated circuits with improved gate structures and methods for fabricating integrated circuits with improved gate structures are provided. In an embodiment, a method for fabricating an integrated circuit includes providing a semiconductor substrate with fin structures. A gate-forming material is deposited over the semiconductor substrate and fin structures. The method includes performing a first etch process to etch the gate-forming material to form a gate line having a first side and a second side. The first side and second side of the gate line are bounded with material. The method includes performing a second etch process to etch a portion of the gate line bound by the material to separate the gate line into adjacent gate structures and to define a tip-to-tip distance between the adjacent gate structures.
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