Invention Grant
- Patent Title: Wafer loaders having buffer zones
- Patent Title (中): 具有缓冲区的晶片装载机
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Application No.: US14281880Application Date: 2014-05-19
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Publication No.: US09502274B2Publication Date: 2016-11-22
- Inventor: Yi Koan Hong , Byung Lyul Park , Jumyong Park , Jisoon Park , Kyu-Ha Lee , Siyoung Choi
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR
- Agency: Renaissance IP Law Group LLP
- Priority: KR10-2013-0109201 20130911
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
Embodiments of the present inventive concepts provide a wafer loader having one or more buffer zones to prevent damage to a wafer loaded in the wafer loader. The wafer loader may include a plurality of loading sections that protrude from a main body and are configured to be arranged at various locations along an edge of the wafer. Each of the loading sections may include a groove into which the edge of the wafer may be inserted. The loading section may include first and second protrusions having first and second inner sides, respectively, that face each other to define the groove therebetween. At least one of the first and second inner sides may include a recess to define the buffer zone.
Public/Granted literature
- US20150068948A1 WAFER LOADERS HAVING BUFFER ZONES Public/Granted day:2015-03-12
Information query
IPC分类: