Invention Grant
- Patent Title: Bottom electrode structure for improved electric field uniformity
- Patent Title (中): 底电极结构,改善电场均匀性
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Application No.: US14645932Application Date: 2015-03-12
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Publication No.: US09502649B2Publication Date: 2016-11-22
- Inventor: Jian-Shiou Huang , Cheng-Yuan Tsai , Yao-Wen Chang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
An integrated circuit with a multilayer bottom electrode, and a corresponding method for manufacturing the integrated circuit, are provided. An insulating layer includes an opening, and a bottom electrode substantially fills the opening. The bottom electrode includes a plurality of layers laterally or vertically stacked upon each other, and lining the opening. The layers of the plurality include corresponding surfaces facing an interior of the opening and extending respectively at angles relative to a top surface of the bottom electrode. Further, the layers of the plurality include corresponding regions of increased resistance or height extending along the corresponding surfaces. A dielectric layer is arranged over the insulating layer and the bottom electrode, and a top electrode arranged over the dielectric layer.
Public/Granted literature
- US20160268506A1 BOTTOM ELECTRODE STRUCTURE FOR IMPROVED ELECTRIC FIELD UNIFORMITY Public/Granted day:2016-09-15
Information query
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