Invention Grant
US09503673B2 Micromechanical component including an integrated photodiode and a microprojector 有权
微机械部件包括集成光电二极管和微型喷射器

Micromechanical component including an integrated photodiode and a microprojector
Abstract:
A micromechanical component includes: at least one micromirror; and an integrated photodiode. The micromechanical component is part of a microprojector which further includes a light source. The integrated photodiode of the micromechanical component receives light from the light source.
Information query
Patent Agency Ranking
0/0