发明授权
- 专利标题： High voltage chuck for a probe station
- 专利标题（中）： 用于探针台的高压卡盘
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申请号： US13702054申请日： 2011-04-11
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公开(公告)号： US09506973B2公开(公告)日： 2016-11-29
- 发明人: Michael E. Simmons , Kazuki Negishi , Roy Jensen , Ryan Garrison , Philip Wolf
- 申请人： Michael E. Simmons , Kazuki Negishi , Roy Jensen , Ryan Garrison , Philip Wolf
- 申请人地址： US OR Beaverton
- 专利权人： Cascade Microtech, Inc.
- 当前专利权人： Cascade Microtech, Inc.
- 当前专利权人地址： US OR Beaverton
- 代理机构： Dascenzo Intellectual Property Law, P.C.
- 国际申请： PCT/US2011/031981 WO 20110411
- 国际公布： WO2011/156049 WO 20111215
- 主分类号： G01R31/26
- IPC分类号： G01R31/26 ; H01L21/683 ; G01R31/28
摘要：
A chuck for testing an integrated circuit includes an upper conductive layer having a lower surface and an upper surface suitable to support a device under test. An upper insulating layer has an upper surface at least in partial face-to-face contact with the lower surface of the upper conductive layer, and a lower surface. A middle conductive layer has an upper surface at least in partial face-to-face contact with the lower surface of the upper insulating layer, and a lower surface.
公开/授权文献
- US20130075982A1 HIGH VOLTAGE CHUCK FOR A PROBE STATION 公开/授权日：2013-03-28
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