Invention Grant
- Patent Title: Method and apparatus for detecting foreign material on a chuck
- Patent Title (中): 用于检测卡盘上异物的方法和装置
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Application No.: US14171874Application Date: 2014-02-04
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Publication No.: US09508578B2Publication Date: 2016-11-29
- Inventor: Shawn A. Adderly , Samantha D. DiStefano , Jeffrey P. Gambino , Max G. Levy , Max L. Lifson , Jed H. Rankin , Timothy D. Sullivan
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/00 ; G01F1/76
Abstract:
An apparatus and method for leak detection of coolant gas from a chuck. The apparatus includes a chuck having a top surface and configured to clamp a substrate to the top surface, the chuck having one or more recessed regions in the top surface, the recessed regions configured to allow a cooling gas to contact a backside of the substrate; a cooling gas inlet and a cooling gas outlet connected to the one or more recessed regions; a first measurement device connected to the cooling gas inlet and configured to measure a first amount of cooling gas entering the cooling gas inlet and a second measurement device connected to the cooling gas outlet and configured to measure a second amount of cooling gas exiting from the cooling gas outlet; and a controller configured to determine a difference between the first amount of cooling gas and the second amount of cooling gas.
Public/Granted literature
- US20150219479A1 METHOD AND APPARATUS FOR DETECTING FOREIGN MATERIAL ON A CHUCK Public/Granted day:2015-08-06
Information query
IPC分类:
