Invention Grant
- Patent Title: Magnetic annealing apparatus
- Patent Title (中): 磁性退火装置
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Application No.: US14211619Application Date: 2014-03-14
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Publication No.: US09508914B2Publication Date: 2016-11-29
- Inventor: Yuji Ono , Toru Ishii , Makoto Saito , Mitsuru Obara , Yasushi Takeuchi
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Abelman, Frayne & Schwab
- Priority: JP2013-058325 20130321; JP2013-058326 20130321
- Main IPC: F27D3/12
- IPC: F27D3/12 ; H01L39/02 ; H01L43/12 ; F27B5/06 ; F27B5/12 ; F27B5/13 ; F27D3/00 ; F27D11/12 ; F27D19/00 ; C21D1/04

Abstract:
Disclosed is a magnetic annealing apparatus including a carrier conveyance region and a workpiece conveyance region. The carrier conveyance region includes: a first mounting table where a carrier is disposed; second mounting tables where carriers convey workpieces from the carrier conveyance region to the workpiece conveyance region; a storage unit; and a carrier conveyance mechanism that performs carrying-out/carrying-in of the carriers. The workpiece conveyance region includes: an aligner device; a workpiece boat; a workpiece conveyance mechanism that conveys the workpieces from the carriers disposed on the second mounting tables to the workpiece boat via the aligner device; a heating unit; a magnetic field generating unit; and a transfer mechanism that transfers the workpieces held by the workpiece boat into the magnetic field generating unit.
Public/Granted literature
- US20140287926A1 MAGNETIC ANNEALING APPARATUS Public/Granted day:2014-09-25
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