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1.发明授权公开(公告)号：US10003018B1
公开(公告)日：2018-06-19
申请号：US15589613
申请日：2017-05-08
发明人： Ian Colgan , Ioan Domsa , George Eyres , Saito Makoto , Noel O'Shaughnessy , Toru Ishii , David Hurley
CPC分类号： H01L43/12 , C21D1/42 , C21D1/54 , C21D9/0018 , H01L27/222 , Y02P10/253
摘要： Embodiments are described for annealing systems and related methods to process microelectronic workpieces using vertical multi-batch perpendicular magnetic annealing systems that allow for a side-by-side configuration of multiple annealing systems to satisfy reduced footprint requirements.
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公开(公告)号：US09822424B2
公开(公告)日：2017-11-21
申请号：US14752271
申请日：2015-06-26
发明人： Toru Ishii , Mitsuru Yamazaki
CPC分类号： C21D9/0006 , C21D1/26 , C21D9/00 , H01F41/304
摘要： An annealing system and method of operating is described. The annealing system includes a furnace having a vacuum chamber wall that defines a processing space into which a plurality of workpieces may be translated and subjected to thermal and magnetic processing, wherein the furnace further includes a heating element assembly having at least one heating element located radially inward from the vacuum chamber wall and immersed within an outer region of the processing space, and wherein the heating element is composed of a non-metallic, anti-magnetic material. The annealing system further includes a magnet system arranged outside the vacuum chamber wall of the furnace, and configured to generate a magnetic field within the processing space.
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公开(公告)号：US20150214473A1
公开(公告)日：2015-07-30
申请号：US14594378
申请日：2015-01-12
发明人： David F. Hurley , Doni Parnell , Shigeru Tahara , Toru Ishii
IPC分类号： H01L43/12
CPC分类号： H01L43/12
摘要： A method for performing post-etch annealing of a workpiece in an annealing system is described. In particular, the method includes disposing one or more workpieces in an annealing system, each of the one or more workpieces having a multilayer stack of thin films that has been patterned using an etching process sequence to form an electronic device characterized by a cell critical dimension (CD), wherein the multilayer stack of thin films includes at least one patterned layer containing magnetic material. Thereafter, the patterned layer containing magnetic material on the one or more workpieces is annealed in the annealing system via an anneal process condition, wherein the anneal process condition is selected to adjust a property of the patterned layer containing magnetic material.
摘要翻译： 描述了在退火系统中对工件进行蚀刻后退火的方法。 特别地，该方法包括在退火系统中布置一个或多个工件，一个或多个工件中的每一个具有多层薄膜，其已经使用蚀刻工艺顺序图案化以形成电子器件，其特征在于电池临界尺寸 （CD），其中所述多层薄膜包括至少一个包含磁性材料的图案层。 此后，在一个或多个工件上包含磁性材料的图案层通过退火工艺条件在退火系统中进行退火，其中选择退火工艺条件以调整含有磁性材料的图案化层的性质。
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公开(公告)号：US11527345B2
公开(公告)日：2022-12-13
申请号：US16466824
申请日：2018-01-03
发明人： Ian Colgan , Ioan Domsa , George Eyres , Toru Ishii , Makoto Saito , David Hurley , Noel O'Shaughnessy , Barry Clarke , Gerhardus Van Der Linde , Pat Hughes
摘要： An apparatus for magnetic annealing one or more workpieces, and a method of operating the apparatus, are described. The apparatus includes: a workpiece holder configured to support one or more workpieces, wherein the one or more workpieces having at least one substantially planar surface; an optional workpiece heating system configured to elevate the one or more workpieces to an anneal temperature; and a magnet assembly having a first magnet and a second magnet, the first and second magnets defining a gap between opposing poles of each magnet, wherein the magnet assembly is arranged to generate a magnetic field substantially perpendicular to the planar surface of the one or more workpieces.
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公开(公告)号：US10297481B2
公开(公告)日：2019-05-21
申请号：US14211360
申请日：2014-03-14
发明人： Yuji Ono , Toru Ishii , Makoto Saito , Mitsuru Obara , Yasushi Takeuchi
IPC分类号： H05B6/10 , H01L21/677 , G11C11/16
摘要： A magnetic annealing apparatus is provided which performs a magnetic annealing on workpieces held in a workpiece boat by using a horizontal superconducting magnet as a magnetic field generating unit. The magnetic annealing apparatus includes a carrier configured to accommodate the workpieces before the magnetic annealing process; and a workpiece conveyance mechanism configured to convey the workpieces held in the carrier to the workpiece boat. The workpiece conveyance mechanism is capable of holding the workpieces in either a horizontal state or in a vertical state.
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公开(公告)号：US20160069613A1
公开(公告)日：2016-03-10
申请号：US14752235
申请日：2015-06-26
发明人： Ian Colgan , Ioan Domsa , George Eyres , Toru Ishii
IPC分类号： F27B1/10 , H01L21/687 , H01L21/677 , H01L21/67 , H01L21/673
CPC分类号： F27B1/10 , F27B17/0025 , F27D2003/0086 , H01L21/67103 , H01L21/67109 , H01L21/67115 , H01L21/67248 , H01L21/67303 , H01L21/67751 , H01L21/67757 , H01L21/68707 , H01L2221/683
摘要： An annealing system and method of operating is described. The annealing system includes a vertical furnace having an inner cylindrical insulating tube and at least one heating element surrounding an outer surface thereof, wherein the inner cylindrical insulating tube defines a processing space into which a plurality of workpieces may be vertically translated and subjected to thermal and/or magnetic processing. The annealing system further includes a workpiece boat for carrying at least one hundred workpieces, a boat loader arranged beneath the vertical furnace, and configured to vertically translate the workpiece boat and position the workpieces within the processing space, and a magnet system arranged outside the vertical furnace and configured to generate a magnetic field within the processing space.
摘要翻译： 描述退火系统和操作方法。 退火系统包括具有内圆柱形绝缘管和围绕其外表面的至少一个加热元件的立式炉，其中内圆柱形绝缘管限定了一个处理空间，多个工件可以垂直平移并经受热和 /或磁性加工。 退火系统还包括用于承载至少一百个工件的工件舟皿，布置在垂直炉下方的船载装置，并且构造成垂直平移工件舟皿并将工件定位在处理空间内;以及磁体系统， 并且被配置为在处理空间内产生磁场。
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公开(公告)号：US11905595B2
公开(公告)日：2024-02-20
申请号：US17163889
申请日：2021-02-01
发明人： Hitoshi Kato , Toru Ishii , Yuji Seshimo , Yuichiro Sase
IPC分类号： C23C16/46 , C23C16/455 , C23C16/458 , C23C16/52
CPC分类号： C23C16/45544 , C23C16/4584 , C23C16/45536 , C23C16/463 , C23C16/52
摘要： A film deposition apparatus includes a rotary table disposed in a vacuum chamber; multiple stages on each of which a substrate is placeable, the stages being arranged along a circumferential direction of the rotary table; a process area configured to supply a process gas toward an upper surface of the rotary table; a heat treatment area that is disposed apart from the process area in the circumferential direction of the rotary table and configured to heat-treat the substrate at a temperature higher than a temperature used in the process area; and a cooling area that is disposed apart from the heat treatment area in the circumferential direction of the rotary table and configured to cool the substrate.
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公开(公告)号：US20160177412A1
公开(公告)日：2016-06-23
申请号：US14752271
申请日：2015-06-26
发明人： Toru Ishii , Mitsuru Yamazaki
CPC分类号： C21D9/0006 , C21D1/26 , C21D9/00 , H01F41/304
摘要： An annealing system and method of operating is described. The annealing system includes a furnace having a vacuum chamber wall that defines a processing space into which a plurality of workpieces may be translated and subjected to thermal and magnetic processing, wherein the furnace further includes a heating element assembly having at least one heating element located radially inward from the vacuum chamber wall and immersed within an outer region of the processing space, and wherein the heating element is composed of a non-metallic, anti-magnetic material. The annealing system further includes a magnet system arranged outside the vacuum chamber wall of the furnace, and configured to generate a magnetic field within the processing space.
摘要翻译： 描述退火系统和操作方法。 退火系统包括具有真空室壁的炉，该真空室壁限定了可以平移多个工件并进行热和磁加工的处理空间，其中炉还包括加热元件组件，该组件具有至少一个位于径向上的加热元件 从真空室壁向内并浸没在处理空间的外部区域内，并且其中加热元件由非金属的抗磁性材料构成。 退火系统还包括布置在炉的真空室壁之外的磁体系统，并被配置为在处理空间内产生磁场。
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公开(公告)号：US20140284321A1
公开(公告)日：2014-09-25
申请号：US14211360
申请日：2014-03-14
发明人： Yuji Ono , Toru Ishii , Makoto Saito , Mitsuru Obara , Yasushi Takeuchi
IPC分类号： H05B6/10
CPC分类号： H01L21/67781 , G11C11/16 , H01L21/67754
摘要： Disclosed is a magnetic annealing apparatus which performs a magnetic annealing on workpieces held in a workpiece boat by using a horizontal superconducting magnet as a magnetic field generating unit. The magnetic annealing apparatus includes a carrier configured to accommodate the workpieces before the magnetic annealing process; and a workpiece conveyance mechanism configured to convey the workpieces held in the carrier to the workpiece boat. The workpiece conveyance mechanism is capable of holding the workpieces in either a horizontal state or in a horizontal state.
摘要翻译： 公开了一种通过使用水平超导磁体作为磁场产生单元对保持在工件舟皿中的工件进行磁性退火的磁性退火装置。 磁退火装置包括：载体，被构造成在磁退火处理之前容纳工件; 以及工件输送机构，其构造成将保持在所述载体中的工件输送到所述工件舟皿。 工件传送机构能够将工件保持在水平状态或水平状态。
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公开(公告)号：US09410742B2
公开(公告)日：2016-08-09
申请号：US14752235
申请日：2015-06-26
发明人： Ian Colgan , Ioan Domsa , George Eyres , Toru Ishii
IPC分类号： H01L21/67 , H01L27/22 , F27B1/10 , H01L21/673 , H01L21/677 , H01L21/687
CPC分类号： F27B1/10 , F27B17/0025 , F27D2003/0086 , H01L21/67103 , H01L21/67109 , H01L21/67115 , H01L21/67248 , H01L21/67303 , H01L21/67751 , H01L21/67757 , H01L21/68707 , H01L2221/683
摘要： An annealing system and method of operating is described. The annealing system includes a vertical furnace having an inner cylindrical insulating tube and at least one heating element surrounding an outer surface thereof, wherein the inner cylindrical insulating tube defines a processing space into which a plurality of workpieces may be vertically translated and subjected to thermal and/or magnetic processing. The annealing system further includes a workpiece boat for carrying at least one hundred workpieces, a boat loader arranged beneath the vertical furnace, and configured to vertically translate the workpiece boat and position the workpieces within the processing space, and a magnet system arranged outside the vertical furnace and configured to generate a magnetic field within the processing space.
摘要翻译： 描述退火系统和操作方法。 退火系统包括具有内圆柱形绝缘管和围绕其外表面的至少一个加热元件的立式炉，其中内圆柱形绝缘管限定了一个处理空间，多个工件可以垂直平移并经受热和 /或磁性加工。 退火系统还包括用于承载至少一百个工件的工件舟皿，布置在垂直炉下方的船载装置，并且构造成垂直平移工件舟皿并将工件定位在处理空间内;以及磁体系统， 并且被配置为在处理空间内产生磁场。
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