公开(公告)号：US09508914B2

公开(公告)日：2016-11-29

申请号：US14211619

申请日：2014-03-14

Applicant: Tokyo Electron Limited

Inventor： Yuji Ono ,  Toru Ishii ,  Makoto Saito ,  Mitsuru Obara ,  Yasushi Takeuchi

IPC: F27D3/12 ,  H01L39/02 ,  H01L43/12 ,  F27B5/06 ,  F27B5/12 ,  F27B5/13 ,  F27D3/00 ,  F27D11/12 ,  F27D19/00 ,  C21D1/04

CPC classification number: H01L39/02 ,  C21D1/04 ,  C21D2281/00 ,  F27B5/06 ,  F27B5/12 ,  F27B5/13 ,  F27D3/0024 ,  F27D3/0084 ,  F27D11/12 ,  F27D19/00 ,  F27D2003/0003 ,  F27D2003/0018 ,  G11C11/16 ,  H01L43/12

Abstract: Disclosed is a magnetic annealing apparatus including a carrier conveyance region and a workpiece conveyance region. The carrier conveyance region includes: a first mounting table where a carrier is disposed; second mounting tables where carriers convey workpieces from the carrier conveyance region to the workpiece conveyance region; a storage unit; and a carrier conveyance mechanism that performs carrying-out/carrying-in of the carriers. The workpiece conveyance region includes: an aligner device; a workpiece boat; a workpiece conveyance mechanism that conveys the workpieces from the carriers disposed on the second mounting tables to the workpiece boat via the aligner device; a heating unit; a magnetic field generating unit; and a transfer mechanism that transfers the workpieces held by the workpiece boat into the magnetic field generating unit.

Abstract translation: 公开了一种包括载体输送区域和工件输送区域的磁性退火装置。 载体输送区域包括：载置体设置的第一安装台; 第二安装台，其中载体将工件从载体输送区域传送到工件输送区域; 存储单元; 以及承载运送机构，其执行承载物的搬运。 工件输送区域包括：对准器装置; 工件船 工件传送机构，其通过对准装置将来自设置在第二安装台上的载体的工件传送到工件舟皿; 加热单元 磁场产生单元; 以及将由工件舟皿保持的工件传送到磁场产生单元的传送机构。

公开(公告)号：US20140287926A1

公开(公告)日：2014-09-25

申请号：US14211619

申请日：2014-03-14

Applicant: TOKYO ELECTRON LIMITED

Inventor： Yuji Ono ,  Toru Ishii ,  Makoto Saito ,  Mitsuru Obara ,  Yasushi Takeuchi

IPC: F27D3/12 ,  H01L39/02

CPC classification number: H01L39/02 ,  C21D1/04 ,  C21D2281/00 ,  F27B5/06 ,  F27B5/12 ,  F27B5/13 ,  F27D3/0024 ,  F27D3/0084 ,  F27D11/12 ,  F27D19/00 ,  F27D2003/0003 ,  F27D2003/0018 ,  G11C11/16 ,  H01L43/12

Abstract: Disclosed is a magnetic annealing apparatus including a carrier conveyance region and a workpiece conveyance region. The carrier conveyance region includes: a first mounting table where a carrier is disposed; second mounting tables where carriers are disposed to convey workpieces from the carrier conveyance region to the workpiece conveyance region; a storage unit that stores carriers; and a carrier conveyance mechanism that performs carrying-out/carrying-in of the carriers. The workpiece conveyance region includes: an aligner device that aligns workpieces; a workpiece boat that holds plural groups of workpieces; a workpiece conveyance mechanism that conveys the workpieces from the carriers disposed on the second mounting tables to the workpiece boat via the aligner device; a heating unit that heats the workpieces; a magnetic field generating unit that applies a magnetic field to the workpieces; and a transfer mechanism that transfers the workpieces held by the workpiece boat into the magnetic field generating unit.

Abstract translation: 公开了一种包括载体输送区域和工件输送区域的磁性退火装置。 载体输送区域包括：载置体设置的第一安装台; 第二安装台，其中载体被设置成将工件从载体输送区域传送到工件输送区域; 存储载体的存储单元; 以及承载运送机构，其执行承载物的搬运。 工件传送区域包括：对准工件的对准器装置; 保持多组工件的工件舟; 工件传送机构，其通过对准装置将来自设置在第二安装台上的载体的工件传送到工件舟皿; 加热单元，加热工件; 向工件施加磁场的磁场产生单元; 以及将由工件舟皿保持的工件传送到磁场产生单元的传送机构。

公开(公告)号：US12300525B2

公开(公告)日：2025-05-13

申请号：US17581248

申请日：2022-01-21

Applicant: Tokyo Electron Limited

Inventor： Hiroto Sato ,  Takahiro Miki ,  Mitsuru Obara

IPC: H01L21/67 ,  G05D7/06

Abstract: A controlling method according to an aspect of the present disclosure includes a first chamber provided with a fan, a second chamber to which a replacement gas is sent from the first chamber by the fan and which includes a transporter configured to transport a substrate, a circulation line configured to communicate the first chamber and the second chamber with each other and circulate the replacement gas, and a valve provided in the circulation line. The method includes replacing an inside of the first chamber and an inside of the second chamber with the replacement gas by turning off the fan and closing the valve, and circulating the replacement gas through the circulation line by turning on the fan and opening the valve. The replacing includes controlling the fan to be turned on and the valve to be opened for a predetermined period of time.

公开(公告)号：US20160273836A1

公开(公告)日：2016-09-22

申请号：US15070123

申请日：2016-03-15

Applicant: Tokyo Electron Limited

Inventor： Mitsuru Obara ,  Hisashi Inoue ,  Keishi Shionaga ,  Masahiro Kobayashi ,  Norio Baba ,  Hiroshi Kikuchi

IPC: F27B5/04 ,  F16B2/02 ,  H01L21/67 ,  H01L21/673 ,  H01L21/677

CPC classification number: F27B5/04 ,  F16B2/02 ,  F27B17/0016 ,  F27B17/0025 ,  F27D3/0084 ,  F27D2003/0012 ,  F27D2003/0046 ,  H01L21/67109 ,  H01L21/67379 ,  H01L21/67389 ,  H01L21/6773 ,  H01L21/67742 ,  H01L21/67772 ,  H01L21/67775

Abstract: The clamp apparatus of the present disclosure includes a clamp member configured to contact a substrate accommodating container from an upper side and fix the substrate accommodating container to a predetermined position when a cover provided on a front surface of the substrate accommodating container is opened/closed, a driving mechanism configured to drive the clamp member; a casing configured to cover the driving mechanism, a suction port configured to communicate with the casing, an exhaust chamber provided near the casing, and a fan provided inside the exhaust chamber.

Abstract translation: 本公开的夹紧装置包括夹持构件，其构造成当设置在基板容纳容器的前表面上的盖被打开/关闭时，从上侧接触基板容纳容器并将基板容纳容器固定到预定位置， 构造成驱动所述夹紧构件的驱动机构; 被构造成覆盖驱动机构的壳体，构造成与壳体连通的吸入口，设置在壳体附近的排气室和设置在排气室内的风扇。

公开(公告)号：US20140284321A1

公开(公告)日：2014-09-25

申请号：US14211360

申请日：2014-03-14

Applicant: TOKYO ELECTRON LIMITED

Inventor： Yuji Ono ,  Toru Ishii ,  Makoto Saito ,  Mitsuru Obara ,  Yasushi Takeuchi

IPC: H05B6/10

CPC classification number: H01L21/67781 ,  G11C11/16 ,  H01L21/67754

Abstract: Disclosed is a magnetic annealing apparatus which performs a magnetic annealing on workpieces held in a workpiece boat by using a horizontal superconducting magnet as a magnetic field generating unit. The magnetic annealing apparatus includes a carrier configured to accommodate the workpieces before the magnetic annealing process; and a workpiece conveyance mechanism configured to convey the workpieces held in the carrier to the workpiece boat. The workpiece conveyance mechanism is capable of holding the workpieces in either a horizontal state or in a horizontal state.

Abstract translation: 公开了一种通过使用水平超导磁体作为磁场产生单元对保持在工件舟皿中的工件进行磁性退火的磁性退火装置。 磁退火装置包括：载体，被构造成在磁退火处理之前容纳工件; 以及工件输送机构，其构造成将保持在所述载体中的工件输送到所述工件舟皿。 工件传送机构能够将工件保持在水平状态或水平状态。

公开(公告)号：US20220238359A1

公开(公告)日：2022-07-28

申请号：US17581248

申请日：2022-01-21

Applicant: Tokyo Electron Limited

Inventor： Hiroto Sato ,  Takahiro Miki ,  Mitsuru Obara

IPC: H01L21/67 ,  G05D7/06

Abstract: A controlling method according to an aspect of the present disclosure includes a first chamber provided with a fan, a second chamber to which a replacement gas is sent from the first chamber by the fan and which includes a transporter configured to transport a substrate, a circulation line configured to communicate the first chamber and the second chamber with each other and circulate the replacement gas, and a valve provided in the circulation line. The method includes replacing an inside of the first chamber and an inside of the second chamber with the replacement gas by turning off the fan and closing the valve, and circulating the replacement gas through the circulation line by turning on the fan and opening the valve. The replacing includes controlling the fan to be turned on and the valve to be opened for a predetermined period of time.

公开(公告)号：US10297481B2

公开(公告)日：2019-05-21

申请号：US14211360

申请日：2014-03-14

Applicant: Tokyo Electron Limited

Inventor： Yuji Ono ,  Toru Ishii ,  Makoto Saito ,  Mitsuru Obara ,  Yasushi Takeuchi

IPC: H05B6/10 ,  H01L21/677 ,  G11C11/16

Abstract: A magnetic annealing apparatus is provided which performs a magnetic annealing on workpieces held in a workpiece boat by using a horizontal superconducting magnet as a magnetic field generating unit. The magnetic annealing apparatus includes a carrier configured to accommodate the workpieces before the magnetic annealing process; and a workpiece conveyance mechanism configured to convey the workpieces held in the carrier to the workpiece boat. The workpiece conveyance mechanism is capable of holding the workpieces in either a horizontal state or in a vertical state.

公开(公告)号：US09857124B2

公开(公告)日：2018-01-02

申请号：US15070123

申请日：2016-03-15

Applicant: Tokyo Electron Limited

Inventor： Mitsuru Obara ,  Hisashi Inoue ,  Keishi Shionaga ,  Masahiro Kobayashi ,  Norio Baba ,  Hiroshi Kikuchi

IPC: F26B5/04 ,  F27B5/04 ,  H01L21/673 ,  H01L21/677 ,  H01L21/67 ,  F16B2/02 ,  F27B17/00 ,  F27D3/00

CPC classification number: F27B5/04 ,  F16B2/02 ,  F27B17/0016 ,  F27B17/0025 ,  F27D3/0084 ,  F27D2003/0012 ,  F27D2003/0046 ,  H01L21/67109 ,  H01L21/67379 ,  H01L21/67389 ,  H01L21/6773 ,  H01L21/67742 ,  H01L21/67772 ,  H01L21/67775

Abstract: The clamp apparatus of the present disclosure includes a clamp member configured to contact a substrate accommodating container from an upper side and fix the substrate accommodating container to a predetermined position when a cover provided on a front surface of the substrate accommodating container is opened/closed, a driving mechanism configured to drive the clamp member; a casing configured to cover the driving mechanism, a suction port configured to communicate with the casing, an exhaust chamber provided near the casing, and a fan provided inside the exhaust chamber.