发明授权
- 专利标题： Heterogeneous integrated circuits and devices thereof with a surrogate substrate and transferred semiconductor devices
- 专利标题（中）： 异质集成电路及其装置具有替代衬底和转移的半导体器件
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申请号： US13096780申请日： 2011-04-28
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公开(公告)号： US09524872B1公开(公告)日： 2016-12-20
- 发明人: Peter D. Brewer , Andrew T. Hunter , Yakov Royter
- 申请人： Peter D. Brewer , Andrew T. Hunter , Yakov Royter
- 申请人地址： US CA Malibu
- 专利权人： HRL Laboratories, LLC
- 当前专利权人： HRL Laboratories, LLC
- 当前专利权人地址： US CA Malibu
- 代理机构： Lewis Roca Rothgerber Christie LLP
- 主分类号： H01L21/30
- IPC分类号： H01L21/30 ; H01L21/18
摘要：
A heterogeneous integrated circuit and method of making the same. An integrated circuit includes a surrogate substrate including a material selected from the group consisting of Group II, Group III, Group IV, Group V, and Group VI materials and their combinations; at least one active semiconductor device including a material combination selected from the group consisting of Group IV-IV, Group III-V and Group II-VI materials; and at least one transferred semiconductor device including a material combination selected from the group consisting of Group IV-IV, Group III-V and Group II-VI materials. The at least one active semiconductor device and the at least one transferred device are interconnected.