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US09525067B2 Method for forming integrated circuits on a strained semiconductor substrate 有权
在应变半导体衬底上形成集成电路的方法

Method for forming integrated circuits on a strained semiconductor substrate
Abstract:
An electronic circuit on a strained semiconductor substrate, includes: electronic components on a first surface of a semiconductor substrate; and at least portions of a layer of a porous semiconductor material on the side of a second surface of the semiconductor substrate, opposite to the first surface, to bend the semiconductor substrate.
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