Invention Grant
- Patent Title: Semiconductor device and method of forming interconnect structure and mounting semiconductor die in recessed encapsulant
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Application No.: US14462347Application Date: 2014-08-18
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Publication No.: US09530738B2Publication Date: 2016-12-27
- Inventor: Linda Pei Ee Chua , Byung Tai Do , Reza A. Pagaila
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/02 ; H01L23/52 ; H01L29/40 ; H01L23/538 ; H01L21/56 ; H01L23/13 ; H01L23/498 ; H01L23/00 ; H01L25/03 ; H01L25/00 ; H01L23/552 ; H01L21/768 ; H01L25/065 ; H01L23/31

Abstract:
A semiconductor device has conductive pillars formed over a carrier. A first semiconductor die is mounted over the carrier between the conductive pillars. An encapsulant is deposited over the first semiconductor die and carrier and around the conductive pillars. A recess is formed in a first surface of the encapsulant over the first semiconductor die. The recess has sloped or stepped sides. A first interconnect structure is formed over the first surface of the encapsulant. The first interconnect structure follows a contour of the recess in the encapsulant. The carrier is removed. A second interconnect structure is formed over a second surface of the encapsulant and first semiconductor die. The first and second interconnect structures are electrically connected to the conductive pillars. A second semiconductor die is mounted in the recess. A third semiconductor die is mounted over the recess and second semiconductor die.
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