Invention Grant
US09534147B2 Polishing composition and method for nickel-phosphorous coated memory disks 有权
镍磷涂层记录盘的抛光组合物和方法

Polishing composition and method for nickel-phosphorous coated memory disks
Abstract:
The invention provides a polishing composition that contains (a) α-alumina particles that have an average particle size of about 250 nm to about 300 nm, (b) a per-type oxidizing agent, (c) a complexing agent, wherein the complexing agent is an amino acid or an organic acid, and (d) water. The invention also provides a method of polishing a substrate, especially a nickel-phosphorous substrate, with the polishing composition.
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