Invention Grant
US09543172B2 Apparatus for providing and directing heat energy in a process chamber
有权
用于在处理室中提供和引导热能的装置
- Patent Title: Apparatus for providing and directing heat energy in a process chamber
- Patent Title (中): 用于在处理室中提供和引导热能的装置
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Application No.: US14043091Application Date: 2013-10-01
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Publication No.: US09543172B2Publication Date: 2017-01-10
- Inventor: Joseph Johnson , Joseph M. Ranish , John Gerling , Mathew Abraham , Aaron Muir Hunter , Aneesh Nainani
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: F26B19/00
- IPC: F26B19/00 ; F26B3/30 ; F21V7/00 ; F24C7/00 ; H01L21/67
Abstract:
Apparatus for providing heat energy to a process chamber are provided herein. The apparatus may include a process chamber body of the process chamber, a solid state source array having a plurality of solid state sources, disposed on a first substrate, to provide heat energy to the process chamber to heat a target component disposed in the process chamber body, and at least one reflector disposed on the first substrate proximate to one or more of the plurality of solid state sources to direct heat energy provided by the one or more of the plurality of solid state sources towards the target component.
Public/Granted literature
- US20140105583A1 APPARATUS FOR PROVIDING AND DIRECTING HEAT ENERGY IN A PROCESS CHAMBER Public/Granted day:2014-04-17
Information query
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