发明授权
US09550163B2 Apparatus for preparing dimeric and trimeric silicon compounds 有权
二聚和三聚硅化合物的制备装置

Apparatus for preparing dimeric and trimeric silicon compounds
摘要:
An apparatus for preparing dimeric and trimeric silicon compounds is provided. The apparatus includes a reactor for generating a nonthermal plasma; a collecting vessel in product flow communication with the nonthermal plasma reactor; and a series of at least three rectification columns in flow communication with the collecting vessel.
公开/授权文献
信息查询
0/0