发明授权
- 专利标题: Apparatus for preparing dimeric and trimeric silicon compounds
- 专利标题(中): 二聚和三聚硅化合物的制备装置
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申请号: US14725131申请日: 2015-05-29
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公开(公告)号: US09550163B2公开(公告)日: 2017-01-24
- 发明人: Juergen Erwin Lang , Hartwig Rauleder , Ekkehard Mueh
- 申请人: Juergen Erwin Lang , Hartwig Rauleder , Ekkehard Mueh
- 申请人地址: DE Essen
- 专利权人: EVONIK DEGUSSA GmbH
- 当前专利权人: EVONIK DEGUSSA GmbH
- 当前专利权人地址: DE Essen
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: DE102007007874 20070214
- 主分类号: B01J19/08
- IPC分类号: B01J19/08 ; C01B21/068 ; C01B21/082 ; C01B31/30 ; C01B33/04 ; C01B33/107 ; C01B33/12 ; C01B33/36 ; C01G17/00 ; C07F7/08 ; C07F7/30
摘要:
An apparatus for preparing dimeric and trimeric silicon compounds is provided. The apparatus includes a reactor for generating a nonthermal plasma; a collecting vessel in product flow communication with the nonthermal plasma reactor; and a series of at least three rectification columns in flow communication with the collecting vessel.
公开/授权文献
- US20150258522A1 METHOD FOR PRODUCING HIGHER SILANES 公开/授权日:2015-09-17