Invention Grant
- Patent Title: Multi-axis differential interferometer
- Patent Title (中): 多轴差分干涉仪
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Application No.: US14431765Application Date: 2013-09-26
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Publication No.: US09551563B2Publication Date: 2017-01-24
- Inventor: Godefridus Cornelius Antonius Couweleers , Thomas Adriaan Ooms , Niels Vergeer
- Applicant: Mapper Lithography IP B.V.
- Applicant Address: NL Delft
- Assignee: MAPPER LITHOGRAPHY IP B.V.
- Current Assignee: MAPPER LITHOGRAPHY IP B.V.
- Current Assignee Address: NL Delft
- Agency: Blakely Sokoloff Taylor & Zafman LLP
- International Application: PCT/NL2013/050691 WO 20130926
- International Announcement: WO2014/051431 WO 20140403
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/26 ; G03F7/20 ; G01B11/14 ; H01J37/317

Abstract:
The invention relates to a multi-axis differential interferometer (1) for measuring a displacement and/or rotation between a first reflective surface (21, 321) and a second reflective surface (81, 381), wherein said measuring is carried out using at least two pairs of beams, wherein each pair is formed by a measurement beam (Mb) to be emitted onto a first one (21, 321) of said reflective surfaces, and a reference beam (Rb) to be emitted onto another one (81, 381) of said reflective surfaces, said interferometer (1) comprising: a first optical module (20) and a second optical module (40), wherein each optical module (20, 40) is configured for receiving a respective coherent beam and for creating one of said pairs therefrom. The invention further relates to a lithography system comprising such an interferometer and to a method for assembling such a multi-axis differential interferometer.
Public/Granted literature
- US20150241200A1 MULTI-AXIS DIFFERENTIAL INTERFEROMETER Public/Granted day:2015-08-27
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