发明授权
- 专利标题: Etching of solar cell materials
- 专利标题(中): 蚀刻太阳能电池材料
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申请号: US13220974申请日: 2011-08-30
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公开(公告)号: US09553229B2公开(公告)日: 2017-01-24
- 发明人: Douglas H. Rose , Pongsthorn Uralwong , David D. Smith
- 申请人: Douglas H. Rose , Pongsthorn Uralwong , David D. Smith
- 申请人地址: US CA San Jose
- 专利权人: SunPower Corporation
- 当前专利权人: SunPower Corporation
- 当前专利权人地址: US CA San Jose
- 代理机构: Okamoto & Benedicto LLP
- 主分类号: H01L31/18
- IPC分类号: H01L31/18
摘要:
A solar cell is fabricated by etching one or more of its layers without substantially etching another layer of the solar cell. In one embodiment, a copper layer in the solar cell is etched without substantially etching a topmost metallic layer comprising tin. For example, an etchant comprising sulfuric acid and hydrogen peroxide may be employed to etch the copper layer selective to the tin layer. A particular example of the aforementioned etchant is a Co-Bra Etch® etchant modified to comprise about 1% by volume of sulfuric acid, about 4% by volume of phosphoric acid, and about 2% by volume of stabilized hydrogen peroxide. In one embodiment, an aluminum layer in the solar cell is etched without substantially etching the tin layer. For example, an etchant comprising potassium hydroxide may be employed to etch the aluminum layer without substantially etching the tin layer.
公开/授权文献
- US20110312119A1 ETCHING OF SOLAR CELL MATERIALS 公开/授权日:2011-12-22
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