Invention Grant
US09559039B2 Semiconductor device and method of using substrate having base and conductive posts to form vertical interconnect structure in embedded die package
有权
使用具有基极和导电柱的衬底的半导体器件和方法在嵌入式芯片封装中形成垂直互连结构
- Patent Title: Semiconductor device and method of using substrate having base and conductive posts to form vertical interconnect structure in embedded die package
- Patent Title (中): 使用具有基极和导电柱的衬底的半导体器件和方法在嵌入式芯片封装中形成垂直互连结构
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Application No.: US13800807Application Date: 2013-03-13
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Publication No.: US09559039B2Publication Date: 2017-01-31
- Inventor: Il Kwon Shim , Jun Mo Koo , Pandi C. Marimuthu , Yaojian Lin , See Chian Lim
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L21/48 ; H01L23/498 ; H01L23/538 ; H01L23/00 ; H01L25/10 ; H01L25/00 ; H01L21/56 ; H01L23/31

Abstract:
A semiconductor device has a substrate including a base and a plurality of conductive posts extending from the base. The substrate can be a wafer-shape, panel, or singulated form. The conductive posts can have a circular, rectangular, tapered, or narrowing intermediate shape. A semiconductor die is disposed through an opening in the base between the conductive posts. The semiconductor die extends above the conductive posts or is disposed below the conductive posts. An encapsulant is deposited over the semiconductor die and around the conductive posts. The base and a portion of the encapsulant is removed to electrically isolate the conductive posts. An interconnect structure is formed over the semiconductor die, encapsulant, and conductive posts. An insulating layer is formed over the semiconductor die, encapsulant, and conductive posts. A semiconductor package is disposed over the semiconductor die and electrically connected to the conductive posts.
Public/Granted literature
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