Invention Grant
- Patent Title: Coating of optical substrates using closed field system
- Patent Title (中): 使用封闭场系统涂覆光学基片
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Application No.: US11575953Application Date: 2005-09-26
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Publication No.: US09562283B2Publication Date: 2017-02-07
- Inventor: Desmond Gibson , John Michael Walls
- Applicant: Desmond Gibson , John Michael Walls
- Applicant Address: US WA Battle Ground
- Assignee: Applied Multilayers LLC
- Current Assignee: Applied Multilayers LLC
- Current Assignee Address: US WA Battle Ground
- Agency: LeClairRyan, a Professional Corporation
- Priority: GB0421389.8 20040925
- International Application: PCT/GB2005/003707 WO 20050926
- International Announcement: WO2006/032925 WO 20060330
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C23C14/35 ; C23C14/50 ; C23C14/10 ; C23C14/06 ; C23C14/54 ; C23C14/08 ; H01J37/34

Abstract:
The invention relates to apparatus and a method for depositing material onto substrates, particularly optical substrates, to form a coating thereon. The apparatus and method incorporates the use of a series of magnetrons provided to be controlled to sputter deposit material provided in targets mounted therein, on to the substrates. There is provided a voltage to the magnetrons to operate the same and the level of voltage which is required to form required coating or coating layer characteristics is determined by using monitoring apparatus, at least when forming the coating or coating layer for the first time. The appropriate voltage level data for operation of the magnetrons can be held in a database and subsequently used to control the voltage level when forming an identified coating or layers of coatings.
Public/Granted literature
- US20080223715A1 Coating of Optical Substrates Using Closed Field System Public/Granted day:2008-09-18
Information query
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