发明授权
- 专利标题： Carrier device
- 专利标题（中）： 载体装置
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申请号： US14990324申请日： 2016-01-07
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公开(公告)号： US09566713B2公开(公告)日： 2017-02-14
- 发明人: Masaru Shimada , Sayako Takarabe , Hideki Matsuo
- 申请人： DAIHEN CORPORATION
- 申请人地址： JP Osaka
- 专利权人： DAIHEN CORPORATION
- 当前专利权人： DAIHEN CORPORATION
- 当前专利权人地址： JP Osaka
- 代理机构： Cantor Colburn LLP
- 优先权： JP2010-249606 20101108
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; B25J11/00 ; B25J9/04 ; B25J9/10 ; B25J19/00 ; B65G49/06 ; H01L21/67
摘要：
There is provided a carrier device that has a linkage arm mechanism, in particular, a carrier device that cools the linkage arm mechanism and can reduce the impact of radiation heat from a work that is in a high temperature state. A carrier device is a carrier device that includes a linkage arm mechanism and a pivot shaft, and the linkage arm mechanism includes lower arms and upper arms, and one ends of which are respectively connected to the lower arms, and horizontal movement members that support a work that is connected to the other ends of the upper arms, and cooling plates are respectively arranged between the upper arms, and the horizontal movement members.
公开/授权文献
- US20160121485A1 CARRIER DEVICE 公开/授权日：2016-05-05
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