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公开(公告)号：US12068132B2
公开(公告)日：2024-08-20
申请号：US17901477
申请日：2022-09-01
申请人： DAIHEN Corporation
发明人： Yuichi Hasegawa , Tatsuya Morii
CPC分类号： H01J37/32183 , H01J37/32128 , H01J37/32165 , H01J37/32174
摘要： A radio-frequency (RF) power supply apparatus includes a first power supply, a second power supply, and a matching device connected to the first/second power supplies. The first power supply supplies first RF power to a load by outputting first RF voltage with a first fundamental frequency. The second power supply supplies second RF power to the load by outputting second RF voltage with a second fundamental frequency lower than the first fundamental frequency. The matching device generates a clock signal with a frequency higher than the first fundamental frequency and provides the clock signal to the first power supply. The first power supply generates, by using the clock signal, a waveform signal with the same cycle as the second RF voltage. The first power supply performs, by using the clock signal, frequency modulation control on the first RF voltage to be output from the first power supply.
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公开(公告)号：US20240158182A1
公开(公告)日：2024-05-16
申请号：US18491768
申请日：2023-10-21
申请人： DAIHEN Corporation
发明人： Hiroto SAKAHARA , Takanobu IZUMI
IPC分类号： B65G47/90
CPC分类号： B65G47/90
摘要： A transport apparatus that can position a transport target object, with a simple configuration. A transport apparatus includes first and second hand portions that simultaneously hold the transport target object; a moving portion moving the first and second hand portions in three axial directions; and a control for the moving portion. The first and second hand portions respectively include first and second holding portions that hold the transport target object, and first and second force sensors that respectively detect external forces applied to the first and second holding portions. The control portion controls the moving portion to move, toward a positioning point, the transport target object to which an upward force is applied within a range where the object does not float above a placement face, using the external forces detected by the first and second force sensors.
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公开(公告)号：US20240157577A1
公开(公告)日：2024-05-16
申请号：US18491769
申请日：2023-10-21
申请人： DAIHEN Corporation
CPC分类号： B25J15/0028 , B25J15/0033 , B25J15/0608 , B25J13/085
摘要： A transport apparatus that can transport heavy transport target objects that are difficult for humans to transport. A transport apparatus includes first and second hand portions that are arranged at a distance from each other in a first direction in a horizontal plane and configured to simultaneously hold a transport target object; a first moving portion that moves each of the first and second hand portions in the first direction; a second moving portion that moves the first moving portion in a second direction that is perpendicular to the first direction in the horizontal plane; a third moving portion that moves the second moving portion in a vertical direction; and a wheeled platform to which the third moving portion is fixed. By utilizing this configuration, it is possible to move the first and second hand portions holding the transport target object, with a simple configuration, and increase the weight capacity.
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4.发明授权公开(公告)号：US11916389B2
公开(公告)日：2024-02-27
申请号：US17257694
申请日：2019-06-27
申请人： DAIHEN Corporation
发明人： Ryuhei Nishio , Akihiro Ohori , Nobuyuki Hattori , Koji Matsunaga
摘要： A grid interconnection system for a power grid includes: a storage battery; a power conversion device that converts power from the storage battery into AC; and an interconnection control device that supplies power from a commercial power supply to a load and supplies power from the power conversion device to the load when the commercial power supply fails. When the commercial power supply is restored, the interconnection control device starts supply of power from the commercial power supply to the load, and stops supply of power from the power conversion device to the load after the supply of power from the commercial power supply to the load is started.
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公开(公告)号：US11791134B2
公开(公告)日：2023-10-17
申请号：US17123642
申请日：2020-12-16
申请人： DAIHEN Corporation
发明人： Tatsuya Morii
CPC分类号： H01J37/32183 , H01J2237/334 , H01J2237/3321
摘要： An impedance adjustment device includes a variable capacitor unit. A microcomputer changes the capacitance value of the variable capacitor unit by switching on or off PIN diodes included in n capacitor circuits separately. Thus, the impedance on the plasma generator side when viewed from a high frequency power supply is adjusted. When changing the capacitance value of the variable capacitor unit to a target capacitance value, the microcomputer changes the capacitance value to a relay capacitance value different from the target capacitance value. The microcomputer changes the capacitance value to the target capacitance value after the capacitance value is changed to the relay capacitance value.
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公开(公告)号：US20230294931A1
公开(公告)日：2023-09-21
申请号：US18182702
申请日：2023-03-13
申请人： DAIHEN Corporation
发明人： Jun IURA
IPC分类号： B65G47/90
CPC分类号： B65G47/902 , B65G47/90
摘要： A transfer robot includes a movable mechanism, a support base moved by the movable mechanism, a horizontal arm pivotable relative to the support base around a first vertical axis, a motor in the horizontal arm to pivot the arm, and a hand disposed above the arm and rotatable relative to the arm around a second axis parallel to the first axis. The hand holds a planar workpiece placed thereon. The arm includes a rotation stage for holding the planar workpiece placed thereon. The rotation stage is rotatable around a third axis parallel to the first axis and movable vertically along the third axis. The hand has a holding center corresponding to the center of the planar workpiece, where the holding center is moved along a rotational trajectory extending across the third axis in plan view. The rotation stage is rotated by the motor provided in the horizontal arm.
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公开(公告)号：US20230249340A1
公开(公告)日：2023-08-10
申请号：US17901421
申请日：2022-09-01
申请人： DAIHEN Corporation
发明人： Ryo KITAGAWA
IPC分类号： B25J9/16
CPC分类号： B25J9/163
摘要： A robot teaching system includes: a robot position and attitude calculation unit that calculates positions and attitudes of a robot corresponding to respective teaching instructions and points between the respective teaching instructions included in a working program for operating the robot; an imaginary robot information generation unit that generates imaginary robot information corresponding to the respective teaching instructions and the points between the respective teaching instructions on a basis of the positions and attitudes of the robot; a teaching instruction selection unit that selects at least one of the respective teaching instructions included in the working program; and a display unit that displays the imaginary robot information on a basis of the selected teaching instruction. The robot teaching system is able to easily confirm the position and attitude of the robot in an arbitrary teaching instruction of the working program.
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公开(公告)号：US20230207264A1
公开(公告)日：2023-06-29
申请号：US18086406
申请日：2022-12-21
申请人： DAIHEN CORPORATION
发明人： Yuichi HASEGAWA
IPC分类号： H01J37/32
CPC分类号： H01J37/32165 , H01J37/32183 , H01J2237/327
摘要： To simplify a process of suppressing an increase in a reflected wave power caused by IMD, provided is a high-frequency power supply system for providing a high-frequency power to a load, including: a first power supply for supplying a first high-frequency power to the load; a second power supply for supplying a second high-frequency power to the load; and a matching device. The matching device provides a system clock to each of the first power supply and the second power supply. The second power supply outputs a second high-frequency voltage at a control period determined based on the system clock provided from the matching device. The first power supply outputs a first high-frequency voltage obtained by frequency modulation of a fundamental wave signal having a first fundamental frequency and through amplification, in each control period determined based on the system clock provided from the matching device.
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公开(公告)号：US20230097183A1
公开(公告)日：2023-03-30
申请号：US17903467
申请日：2022-09-06
申请人： DAIHEN CORPORATION
发明人： Yuichi HASEGAWA , Yuya UENO
摘要： The present disclosure, calculating an impedance change considering a reflected wave due to IMD, provides an impedance matching device for performing impedance matching between a source power supply side and a load side, including: a detector that detects a forward wave power supplied from the source power supply and a reflected wave power from the load and outputs a forward wave voltage as a component of the forward wave power and a reflected wave voltage as a component of the reflected wave power, an impedance information output part that calculates impedance from the forward wave voltage and the reflected wave voltage, and a matching part that performs matching operation based on an impedance value supplied from the impedance information output part. The impedance information output part complexifies each of the forward wave voltage and the reflected wave voltage to calculate an impedance value to generate an impedance locus.
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公开(公告)号：US20230096097A1
公开(公告)日：2023-03-30
申请号：US17900510
申请日：2022-08-31
申请人： DAIHEN Corporation
发明人： Shinichiro Nakagawa
摘要： The welding line detection system includes a photographing unit that photographs an image of an object to be welded, a coordinate system setting unit that sets a user coordinate system based on a marker included in the photographed image, a point-group-data plotting unit that detects a specific position of the marker on the basis of the image, sets the detected specific position on point group data acquired by a distance measurement sensor that measures a distance to the object to be welded, and plots, in the user coordinate system, the point group data to which coordinates in the user coordinate system, using the set specific position as an origin, are given, and a welding line detection unit that detects, on the basis of the point group data plotted in the user coordinate system, a welding line of the object to be welded.
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