Invention Grant
US09568565B2 Vapor cell structure having cavities connected by channels for micro-fabricated atomic clocks, magnetometers, and other devices
有权
具有通过用于微制造原子钟的通道连接的腔的气泡结构，磁力计和其他装置
- Patent Title: Vapor cell structure having cavities connected by channels for micro-fabricated atomic clocks, magnetometers, and other devices
- Patent Title (中): 具有通过用于微制造原子钟的通道连接的腔的气泡结构，磁力计和其他装置
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Application No.: US13948888Application Date: 2013-07-23
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Publication No.: US09568565B2Publication Date: 2017-02-14
- Inventor: Roozbeh Parsa , Peter J. Hopper
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Jacqueline J. Garner; Charles A. Brill; Frank D. Cimino
- Main IPC: H01S1/06
- IPC: H01S1/06 ; G01R33/032 ; G04F5/14
Abstract:
A first apparatus includes a vapor cell having first and second cavities fluidly connected by multiple channels. The first cavity is configured to receive a material able to dissociate into one or more gases that are contained within the vapor cell. The second cavity is configured to receive the one or more gases. The vapor cell is configured to allow radiation to pass through the second cavity. A second apparatus includes a vapor cell having a first wafer with first and second cavities and a second wafer with one or more channels fluidly connecting the cavities. The first cavity is configured to receive a material able to dissociate into one or more gases that are contained within the vapor cell. The second cavity is configured to receive the one or more gases. The vapor cell is configured to allow radiation to pass through the second cavity.
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