Invention Grant
- Patent Title: Developing method, developing apparatus and storage medium
- Patent Title (中): 显影方法,显影装置和存储介质
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Application No.: US14449419Application Date: 2014-08-01
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Publication No.: US09568829B2Publication Date: 2017-02-14
- Inventor: Kousuke Yoshihara , Hideharu Kyouda , Koshi Muta , Taro Yamamoto , Yasushi Takiguchi , Masahiro Fukuda
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Minato-Ku
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Minato-Ku
- Agency: Burr & Brown, PLLC
- Priority: JP2013-162596 20130805; JP2014-122683 20140613
- Main IPC: B05D3/12
- IPC: B05D3/12 ; G03F7/30 ; B05C5/02 ; B05D1/00 ; B05C11/08 ; B05D1/26 ; H01L21/67

Abstract:
A developing method includes: horizontally holding an exposed substrate by a substrate holder; forming a liquid puddle on a part of the substrate, by supplying a developer from a developer nozzle; rotating the substrate; spreading the liquid puddle on a whole surface of the substrate, by moving the developer nozzle such that a supply position of the developer on the rotating substrate is moved in a radial direction of the substrate; bringing, simultaneously with the spreading of the liquid puddle on the whole surface of the substrate, a contact part into contact with the liquid puddle, the contact part being configured to be moved together with the developer nozzle and having a surface opposed to the substrate which is smaller than the surface of the substrate. According to this method, an amount of liquid falling down to the outside of the substrate can be inhibited. In addition, since the rotating speed of the substrate can be decreased, spattering of the developer can be inhibited. Further, a throughput can be improved by stirring the developer.
Public/Granted literature
- US20150036109A1 DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM Public/Granted day:2015-02-05
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