Invention Grant
US09574263B2 Controlled deposition of metal and metal cluster ions by surface field patterning in soft-landing devices
有权
通过软着陆装置中的表面场图案控制金属和金属簇离子的沉积
- Patent Title: Controlled deposition of metal and metal cluster ions by surface field patterning in soft-landing devices
- Patent Title (中): 通过软着陆装置中的表面场图案控制金属和金属簇离子的沉积
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Application No.: US14077911Application Date: 2013-11-12
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Publication No.: US09574263B2Publication Date: 2017-02-21
- Inventor: Guido Fridolin Verbeck, IV , Stephen Davila
- Applicant: University of North Texas
- Applicant Address: US TX Denton
- Assignee: University of North Texas
- Current Assignee: University of North Texas
- Current Assignee Address: US TX Denton
- Agency: Chalker Flores, LLP
- Agent Edwin S. Flores; Chainey P. Singleton
- Main IPC: C23C14/22
- IPC: C23C14/22 ; B82B3/00 ; B82Y30/00 ; B82Y40/00 ; C23C14/28 ; C23C14/54 ; C23C14/04 ; C23C14/12

Abstract:
A soft-landing (SL) instrument for depositing ions onto substrates using a laser ablation source is described herein. The instrument of the instant invention is designed with a custom drift tube and a split-ring ion optic for the isolation of selected ions. The drift tube allows for the separation and thermalization of ions formed after laser ablation through collisions with an inert bath gas that allow the ions to be landed at energies below 1 eV onto substrates. The split-ring ion optic is capable of directing ions toward the detector or a landing substrate for selected components. The inventors further performed atomic force microscopy (AFM) and drift tube measurements to characterize the performance characteristics of the instrument.
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