Invention Grant
US09576952B2 Integrated circuits with varying gate structures and fabrication methods
有权
具有不同栅极结构和制造方法的集成电路
- Patent Title: Integrated circuits with varying gate structures and fabrication methods
- Patent Title (中): 具有不同栅极结构和制造方法的集成电路
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Application No.: US14188778Application Date: 2014-02-25
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Publication No.: US09576952B2Publication Date: 2017-02-21
- Inventor: Manoj Joshi , Manfred Eller , Richard J. Carter , Srikanth Balaji Samavedam
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Kristian E. Ziegler
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/8234 ; H01L21/8238 ; H01L27/092

Abstract:
Integrated circuits and fabrication methods are provided. The integrated circuit includes: a varying gate structure disposed over a substrate structure, the varying gate structure including a first gate stack in a first region of the substrate structure, and a second gate stack in a second region of the substrate structure; a first field-effect transistor in the first region, the first field-effect transistor including the first gate stack and having a first threshold voltage; and a second field-effect transistor in the second region, the second field-effect transistor including the second gate stack and having a second threshold voltage, where the first threshold voltage is different from the second threshold voltage. The methods include providing the varying gate structure, the providing including: sizing layer(s) of the varying gate structure with different thickness(es) in different region(s).
Public/Granted literature
- US20150243658A1 INTEGRATED CIRCUITS WITH VARYING GATE STRUCTURES AND FABRICATION METHODS Public/Granted day:2015-08-27
Information query
IPC分类: