Invention Grant
US09578689B2 High temperature gas line heater system including silicone foam rubber
有权
高温气体管线加热器系统包括硅胶泡沫橡胶
- Patent Title: High temperature gas line heater system including silicone foam rubber
- Patent Title (中): 高温气体管线加热器系统包括硅胶泡沫橡胶
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Application No.: US13949948Application Date: 2013-07-24
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Publication No.: US09578689B2Publication Date: 2017-02-21
- Inventor: Jason S. Smith , Casey C. Clausen , James H. Kreisel , Thomas J. Restis
- Applicant: Jason S. Smith , Casey C. Clausen , James H. Kreisel , Thomas J. Restis
- Applicant Address: US IL Cary
- Assignee: DUREX INTERNATIONAL CORP.
- Current Assignee: DUREX INTERNATIONAL CORP.
- Current Assignee Address: US IL Cary
- Agency: Charmasson, Buchaca & Leach, LLP
- Main IPC: E03B7/10
- IPC: E03B7/10 ; F24H1/10 ; H05B3/02 ; H05B3/58 ; H01L21/67
Abstract:
A semi-flexible laminar silicone foam rubber-base heater for high temperature gas supply and exhaust lines used in microelectronic semiconductor fabrication uses superimposed adhesively bonded layers of an etched foil heater element containing layer, a high-to-low heat thermal transition layer, a thermal fuse laden silicone foam rubber insulation layer and a durable wrapping layer. The system can provide for the combined use of highly controllable etched foil heater elements, clean silicone foam rubber insulation, and inexpensive mechanical thermal fuses safely in a high heat gas supply and exhaust line environment.
Public/Granted literature
- US20140029925A1 High temperature gas line heater system including silicone foam rubber Public/Granted day:2014-01-30
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