Invention Grant
- Patent Title: Piezoelectric thin film element, inkjet recording head, and inkjet image-forming apparatus
- Patent Title (中): 压电薄膜元件，喷墨记录头和喷墨图像形成装置
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Application No.: US14206092Application Date: 2014-03-12
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Publication No.: US09586401B2Publication Date: 2017-03-07
- Inventor: Masaru Shinkai , Masahiro Ishimori , Toshiaki Masuda
- Applicant: Masaru Shinkai , Masahiro Ishimori , Toshiaki Masuda
- Applicant Address: JP Tokyo
- Assignee: RICOH COMPANY, LTD.
- Current Assignee: RICOH COMPANY, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Cooper & Dunham LLP
- Priority: JP2013-051187 20130314; JP2013-228709 20131101
- Main IPC: B41J2/045
- IPC: B41J2/045 ; B41J2/14 ; H01L41/09 ; H01L41/314 ; B41J2/16 ; H01L41/047 ; H01L41/08 ; H01L41/187 ; H01L41/317
Abstract:
A piezoelectric thin film element includes a substrate, a vibration plate provided on the substrate, a lower electrode provided on the vibration plate, the lower electrode including at least a platinum metal film or an iridium metal film, a piezoelectric film provided on the lower electrode, the piezoelectric film including a polycrystalline body, and an upper electrode provided on the piezoelectric film, the lower electrode being provided on an upper portion of a titanium oxide film formed on the vibration plate, the lower electrode including a platinum metal film or an iridium metal film formed on the titanium oxide film and conductive oxide formed on the platinum metal film or the iridium metal film, and the platinum metal film or the iridium metal film being a precise film.
Public/Granted literature
- US20140267509A1 PIEZOELECTRIC THIN FILM ELEMENT, INKJET RECORDING HEAD, AND INKJET IMAGE-FORMING APPARATUS Public/Granted day:2014-09-18
Information query
IPC分类:
