Invention Grant
US09589910B2 Semiconductor device and method of forming base leads from base substrate as standoff for stacking semiconductor die
有权
半导体器件以及从基底衬底形成基底引线作为用于堆叠半导体管芯的间隙的方法
- Patent Title: Semiconductor device and method of forming base leads from base substrate as standoff for stacking semiconductor die
- Patent Title (中): 半导体器件以及从基底衬底形成基底引线作为用于堆叠半导体管芯的间隙的方法
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Application No.: US13846014Application Date: 2013-03-18
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Publication No.: US09589910B2Publication Date: 2017-03-07
- Inventor: Reza A. Pagaila , Dioscoro A. Merilo
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L23/488
- IPC: H01L23/488 ; H01L23/00 ; H01L21/48 ; H01L21/56 ; H01L23/495 ; H01L25/065 ; H01L25/00 ; H01L23/538 ; H01L25/10

Abstract:
A semiconductor device has a base substrate with first and second opposing surfaces. A first etch-resistant conductive layer is formed over the first surface of the base substrate. A second etch-resistant conductive layer is formed over the second surface of the base substrate. A first semiconductor die has bumps formed over contact pads on an active surface of the first die. The first die is mounted over a first surface of the first conductive layer. An encapsulant is deposited over the first die and base substrate. A portion of the base substrate is removed to form electrically isolated base leads between opposing portions of the first and second conductive layers. A second semiconductor die is mounted over the encapsulant and a second surface of the first conductive layer between the base leads. A height of the base leads is greater than a thickness of the second die.
Public/Granted literature
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