Invention Grant
- Patent Title: Vertical and 3D memory devices and methods of manufacturing the same
- Patent Title (中): 垂直和3D存储器件及其制造方法
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Application No.: US14548252Application Date: 2014-11-19
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Publication No.: US09589979B2Publication Date: 2017-03-07
- Inventor: Shih-Ping Hong
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L29/423 ; H01L29/51 ; H01L21/28

Abstract:
A memory device is described, which includes a block of memory cells comprising a plurality of stacks of horizontal active lines such as NAND string channel lines, with a plurality of vertical slices penetrated by, and surrounding, the horizontal active lines to provide a gate-all-around structure. A memory film is disposed between the horizontal active lines in the plurality of stacks and the vertical slices in the plurality of vertical slices. A 3D, horizontal channel, gate-all-around NAND flash memory is provided. A method for manufacturing a memory involves a buttress process. The buttress process enables horizontal channel, gate-all-around structures.
Public/Granted literature
- US20160141299A1 VERTICAL AND 3D MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2016-05-19
Information query
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