Invention Grant
- Patent Title: Method for producing a semiconductor device
- Patent Title (中): 半导体器件的制造方法
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Application No.: US15238122Application Date: 2016-08-16
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Publication No.: US09590175B2Publication Date: 2017-03-07
- Inventor: Fujio Masuoka , Hiroki Nakamura
- Applicant: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Applicant Address: SG Singapore
- Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Brinks Gilson & Lione
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/8238 ; H01L21/336 ; H01L29/76 ; H01L29/788 ; H01L43/12 ; H01L27/22 ; H01L43/08 ; H01L43/02

Abstract:
A semiconductor device includes four or more memory cells arranged on a row, the memory cells each including a first pillar-shaped semiconductor layer, a first gate insulating film around the semiconductor layer, a first gate line around the first gate insulating film, a third gate insulating film around an upper portion of the semiconductor layer, a first contact electrode around the third gate insulating film, a second contact electrode connecting upper portions of the semiconductor layer and the first contact electrode, and a magnetic tunnel junction storage element on the second contact electrode, a first source line connecting lower portions of the semiconductor layers to each other, a first bit line extending in a direction perpendicular to a direction of the first gate line and connected to an upper portion of the storage element, and a second source line extending in a direction perpendicular to the first source line.
Public/Granted literature
- US20160359106A1 METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE Public/Granted day:2016-12-08
Information query
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