Invention Grant
- Patent Title: Polishing composition
- Patent Title (中): 抛光组成
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Application No.: US14440688Application Date: 2013-11-19
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Publication No.: US09593259B2Publication Date: 2017-03-14
- Inventor: Takayuki Matsushita
- Applicant: NITTA HAAS INCORPORATED
- Applicant Address: JP Osaka
- Assignee: NITTA HAAS INCORPORATED
- Current Assignee: NITTA HAAS INCORPORATED
- Current Assignee Address: JP Osaka
- Agency: Clark & Brody
- Priority: JP2012-262549 20121130
- International Application: PCT/JP2013/081164 WO 20131119
- International Announcement: WO2014/084091 WO 20140605
- Main IPC: C09G1/02
- IPC: C09G1/02 ; C23F1/30 ; C09K3/14 ; H01L21/02

Abstract:
A polishing composition of the present invention contains: a polyvinyl alcohol resin having a 1,2-diol structure in its side chain, the polyvinyl alcohol resin being a copolymer of a monomer represented by Formula (1) below and a vinyl ester monomer; an organic acid; and abrasive grains whose surfaces are chemically modified so as to have a minus zeta potential on the surfaces in a solution with a pH of 2.0 or more and to have no isoelectric point: (where R1 to R6 each independently denote a hydrogen atom or an organic group, X denotes a single bond or a linking group, and R7 and R8 each independently denote a hydrogen atom or R9—CO— (where R9 denotes an alkyl group)).
Public/Granted literature
- US20150299517A1 POLISHING COMPOSITION Public/Granted day:2015-10-22
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