Invention Grant
US09595478B2 Dummy gate used as interconnection and method of making the same 有权
虚拟门用作互连和制作相同的方法

Dummy gate used as interconnection and method of making the same
Abstract:
Process of using a dummy gate as an interconnection and a method of manufacturing the same are disclosed. Embodiments include forming on a semiconductor substrate dummy gate structures at cell boundaries, each dummy gate structure including a set of sidewall spacers and a cap disposed between the sidewall spacers; removing a first sidewall spacer or at least a portion of a first cap on a first side of a first dummy gate structure and forming a first gate contact trench over the first dummy gate structure; and filling the first gate contact trench with a metal to form a first gate contact.
Public/Granted literature
Information query
Patent Agency Ranking
0/0