Invention Grant
- Patent Title: Integrated dual axis fluxgate sensor using double deposition of magnetic material
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Application No.: US15171615Application Date: 2016-06-02
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Publication No.: US09606193B2Publication Date: 2017-03-28
- Inventor: Anuraag Mohan , Dok Won Lee , William French , Erika L. Mazotti
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Jacqueline J. Garner; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L43/10 ; H01L43/12 ; G01R33/04 ; G01R33/09 ; H01L43/00 ; H01L29/26
Abstract:
A method of fabricating fluxgate devices to measure the magnetic field in two orthogonal, in plane directions, by using a composite-anisotropic magnetic core structure.
Public/Granted literature
- US20160274197A1 INTEGRATED DUAL AXIS FLUXGATE SENSOR USING DOUBLE DEPOSITION OF MAGNETIC MATERIAL Public/Granted day:2016-09-22
Information query
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