Invention Grant
- Patent Title: Bonding system
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Application No.: US14457219Application Date: 2014-08-12
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Publication No.: US09607869B2Publication Date: 2017-03-28
- Inventor: Masataka Matsunaga , Naoto Yoshitaka , Satoshi Nishimura
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Abelman, Frayne & Schwab
- Priority: JP2013-177750 20130829
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L23/00 ; H01L21/68

Abstract:
An object of the present disclosure is to reduce a footprint. A bonding system of the present disclosure includes a first processing station, a second processing station, and a carry-in/out station. The first processing station includes a first conveyance region, a coating device, a heating device, and a first delivery block. The second processing station includes a plurality of bonding devices, a second conveyance region, and a second delivery block. Each of the plurality of bonding devices bonds the first substrate to the second substrate. The second conveyance region is a region configured to convey the first substrate and the second substrate to and from the plurality of bonding devices. The second delivery block delivers the first substrate, the second substrate and the superimposed substrate between the first conveyance region and the second conveyance region.
Public/Granted literature
- US20150059985A1 BONDING SYSTEM Public/Granted day:2015-03-05
Information query
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